Journal of Vacuum Science and Technology A, 1520-8559

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  1. 2018
  2. In situ characterization of the deposition of anatase TiO2 on rutile TiO2(110)

    Head, A. R., Niclas Johansson, Niu, Y., Snezhkova, O., Chaudhary, S., Joachim Schnadt, Bluhm, H., Chen, C., Avila, J. & Asensio, M. C. 2018 Mar 1 In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 36, 2, 02D405

    Research output: Contribution to journalArticle

  3. 2017
  4. Atomic layer etching of gallium nitride (0001)

    Kauppinen, C., Khan, S. A., Sundqvist, J., Suyatin, D. B., Suihkonen, S., Kauppinen, E. I. & Sopanen, M. 2017 Nov 1 In : Journal of Vacuum Science and Technology A. 35, 6, 060603

    Research output: Contribution to journalArticle

  5. Review Article: Recommended reading list of early publications on atomic layer deposition - Outcome of the "virtual Project on the History of ALD"

    Ahvenniemi, E. , Akbashev, A. R. , Ali, S. , Bechelany, M. , Berdova, M. , Boyadjiev, S. , Cameron, D. C. , Chen, R. , Chubarov, M. , Cremers, V. , Devi, A. , Drozd, V. , Elnikova, L. , Gottardi, G. , Grigoras, K. , Hausmann, D. M. , Hwang, C. S. , Jen, S. H. , Kallio, T. , Kanervo, J. & 42 others Khmelnitskiy, I., Kim, D. H., Klibanov, L., Koshtyal, Y., Krause, A. O. I., Kuhs, J., Kärkkänen, I., Kääriäinen, M. L., Kääriäinen, T., Lamagna, L., Łapicki, A. A., Leskelä, M., Lipsanen, H., Lyytinen, J., Malkov, A., Malygin, A., Mennad, A., Militzer, C., Molarius, J., Norek, M., Özgit-Akgün, Ç., Panov, M., Pedersen, H., Piallat, F., Popov, G., Puurunen, R. L., Rampelberg, G., Ras, R. H. A., Rauwel, E., Roozeboom, F., Sajavaara, T., Salami, H., Savin, H., Schneider, N., Seidel, T. E., Sundqvist, J., Suyatin, D. B., Törndahl, T., Van Ommen, J. R., Wiemer, C., Ylivaara, O. M. E. & Yurkevich, O. 2017 Jan 1 In : Journal of Vacuum Science and Technology A. 35, 1, 010801

    Research output: Contribution to journalArticle

  6. 2010
  7. Experiences from nonevaporable getter-coated vacuum chambers at the MAX II synchrotron light source

    Rosborg, A., Wallén, E., Berglund, M., Kersevan, R. & Hahn, M. 2010 In : Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. 28, 2, p. 220-225

    Research output: Contribution to journalArticle

  8. 1999
  9. High Resolution X-Ray Photoelectron Spectroscopy and INDO/S-CI Study of the Core Electron Shakeup States of PMDA-ODA Polyimide

    Nakayama, Y., Petter Persson, Lunell, S., Kowalczyk, S. P., Wannberg, B. & Gelius, U. 1999 In : Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. 17, 5, p. 2791-2799

    Research output: Contribution to journalArticle

  10. 1998
  11. High rate reactive dc magnetron sputter deposition of Al2O3 films

    Olsson, M., Macak, K., Helmersson, U. & Hjörvarsson, B. 1998 In : Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. 16, 2, p. 639

    Research output: Contribution to journalArticle

  12. Modeling of the deposition of stoichiometric Al2O3 using non-arcing dc magnetron sputtering

    Macak, K., Nyberg, T., Macak, P., Olsson, M., Helmersson, U. & Berg, S. 1998 In : Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. 16, 3, p. 1286

    Research output: Contribution to journalArticle

  13. 1989
  14. Core-level shifts on the H2O exposed Ge(100)2×1 surface

    Christer Larsson, Flodström, A., Karlsson, U. & Yang, Y. 1989 In : Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. 7, 3, p. 2044-2048

    Research output: Contribution to journalArticle

  15. 1987
  16. Adsorption of H2O on planar and stepped Si(100): Structural aspects

    Christer Larsson, Johnson, A., Flodström, A. & Madey, T. 1987 In : Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. 5, 4, p. 842-846

    Research output: Contribution to journalArticle