Journal of Vacuum Science and Technology A, 1520-8559

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  1. 2018
  2. Ultrahigh vacuum dc magnetron sputter-deposition of epitaxial Pd(111)/Al2O3(0001) thin films

    Aleman, A., Li, C., Zaid, H., Kindlund, H., Fankhauser, J., Prikhodko, S. V., Goorsky, M. S. & Kodambaka, S., 2018 May 1, In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 36, 3, 030602

    Research output: Contribution to journalArticle

  3. In situ characterization of the deposition of anatase TiO2 on rutile TiO2(110)

    Head, A. R., Niclas Johansson, Yuran Niu, Snezhkova, O., Chaudhary, S., Joachim Schnadt, Bluhm, H., Chen, C., Avila, J. & Asensio, M. C., 2018 Mar 1, In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 36, 2, 02D405

    Research output: Contribution to journalArticle

  4. 2017
  5. Atomic layer etching of gallium nitride (0001)

    Kauppinen, C., Khan, S. A., Sundqvist, J., Suyatin, D. B., Suihkonen, S., Kauppinen, E. I. & Sopanen, M., 2017 Nov 1, In : Journal of Vacuum Science and Technology A. 35, 6, 060603

    Research output: Contribution to journalArticle

  6. Review Article: Recommended reading list of early publications on atomic layer deposition - Outcome of the "virtual Project on the History of ALD"

    Ahvenniemi, E. , Akbashev, A. R. , Ali, S. , Bechelany, M. , Berdova, M. , Boyadjiev, S. , Cameron, D. C. , Chen, R. , Chubarov, M. , Cremers, V. , Devi, A. , Drozd, V. , Elnikova, L. , Gottardi, G. , Grigoras, K. , Hausmann, D. M. , Hwang, C. S. , Jen, S. H. , Kallio, T. , Kanervo, J. & 42 others Khmelnitskiy, I., Kim, D. H., Klibanov, L., Koshtyal, Y., Krause, A. O. I., Kuhs, J., Kärkkänen, I., Kääriäinen, M. L., Kääriäinen, T., Lamagna, L., Łapicki, A. A., Leskelä, M., Lipsanen, H., Lyytinen, J., Malkov, A., Malygin, A., Mennad, A., Militzer, C., Molarius, J., Norek, M., Özgit-Akgün, Ç., Panov, M., Pedersen, H., Piallat, F., Popov, G., Puurunen, R. L., Rampelberg, G., Ras, R. H. A., Rauwel, E., Roozeboom, F., Sajavaara, T., Salami, H., Savin, H., Schneider, N., Seidel, T. E., Sundqvist, J., Suyatin, D. B., Törndahl, T., Van Ommen, J. R., Wiemer, C., Ylivaara, O. M. E. & Yurkevich, O., 2017 Jan 1, In : Journal of Vacuum Science and Technology A. 35, 1, 010801

    Research output: Contribution to journalArticle

  7. 2010
  8. Experiences from nonevaporable getter-coated vacuum chambers at the MAX II synchrotron light source

    Rosborg, A., Wallén, E., Berglund, M., Kersevan, R. & Hahn, M., 2010, In : Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. 28, 2, p. 220-225

    Research output: Contribution to journalArticle

  9. 1999
  10. High Resolution X-Ray Photoelectron Spectroscopy and INDO/S-CI Study of the Core Electron Shakeup States of PMDA-ODA Polyimide

    Nakayama, Y., Petter Persson, Lunell, S., Kowalczyk, S. P., Wannberg, B. & Gelius, U., 1999, In : Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. 17, 5, p. 2791-2799

    Research output: Contribution to journalArticle

  11. 1998
  12. High rate reactive dc magnetron sputter deposition of Al2O3 films

    Olsson, M., Macak, K., Helmersson, U. & Hjörvarsson, B., 1998, In : Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. 16, 2, p. 639

    Research output: Contribution to journalArticle

  13. Modeling of the deposition of stoichiometric Al2O3 using non-arcing dc magnetron sputtering

    Macak, K., Nyberg, T., Macak, P., Olsson, M., Helmersson, U. & Berg, S., 1998, In : Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. 16, 3, p. 1286

    Research output: Contribution to journalArticle

  14. 1989
  15. Core-level shifts on the H2O exposed Ge(100)2×1 surface

    Christer Larsson, Flodström, A., Karlsson, U. & Yang, Y., 1989, In : Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. 7, 3, p. 2044-2048

    Research output: Contribution to journalArticle

  16. 1987
  17. Adsorption of H2O on planar and stepped Si(100): Structural aspects

    Christer Larsson, Johnson, A., Flodström, A. & Madey, T., 1987, In : Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. 5, 4, p. 842-846

    Research output: Contribution to journalArticle

  18. A photoelectron spectroscopy and photon stimulated desorption study of H2O on Si(100) 2×1

    Christer Larsson, Flodström, A., Ralf Nyholm, Incoccia, L. & Senf, F., 1987, In : Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. 5, 6, p. 3321-3324

    Research output: Contribution to journalArticle