Nanoelectrochemical transducers for (bio-) chemical sensor applications fabricated by nanoimprint lithography

Research output: Contribution to journalArticle

Abstract

Nanometer-structured transducers for commercial use in pharmaceutical, medical or (bio-) chemical analysis have so far been hardly accessible since they could not be produced by parallel lithography techniques at reasonable costs. We introduce here a method on. how to fabricate nanometer-structured interdigitated array electrodes including interconnections and bond pads in the micrometer range in a single imprint step on 2-in. wafer scale. The method enables the mass production of those devices at lowest cost opening a new field for the commercial use of nanometer-structured sensor systems.

Details

Authors
  • Marc Beck
  • F Persson
  • Patrick Carlberg
  • Mariusz Graczyk
  • Ivan Maximov
  • TGI Ling
  • Lars Montelius
Organisations
Research areas and keywords

Subject classification (UKÄ) – MANDATORY

  • Condensed Matter Physics

Keywords

  • transducer, nanoimprint lithography, sensor, redox cycling, interdigitated array electrode
Original languageEnglish
Pages (from-to)837-842
JournalMicroelectronic Engineering
Volume73-74
StatePublished - 2004
Peer-reviewedYes