Nanoelectrochemical transducers for (bio-) chemical sensor applications fabricated by nanoimprint lithography
Research output: Contribution to journal › Article
Nanometer-structured transducers for commercial use in pharmaceutical, medical or (bio-) chemical analysis have so far been hardly accessible since they could not be produced by parallel lithography techniques at reasonable costs. We introduce here a method on. how to fabricate nanometer-structured interdigitated array electrodes including interconnections and bond pads in the micrometer range in a single imprint step on 2-in. wafer scale. The method enables the mass production of those devices at lowest cost opening a new field for the commercial use of nanometer-structured sensor systems.
|Research areas and keywords||
Subject classification (UKÄ) – MANDATORY
|State||Published - 2004|