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Damage in Dry Etching: A Comparative Study of Atomic Layer and Reactive Ion Etching
Maximov, I.
(First/primary/lead supervisor)
LTH Profile Area: Nanoscience and Semiconductor Technology
Solid State Physics
NanoLund: Centre for Nanoscience
Activity
:
Examination and supervision
›
Examination
Description
MSc thesis
Period
2022 Feb 23
→
2023 Mar 15
Examinee/Supervised person
Mohammad Al Abrash
Degree of Recognition
National
X