Real-Time Monitoring of the Surface Chemistry of Atomic Layer Deposition by Ambient Pressure X-ray Photoelectron Spectroscopy

Activity: Talk or presentationInvited talk

Description

Invited talk at the "Beating the Complexity of Matter through the Selectivity of X-rays" workshop, Helmholtz-Zentrum Berlin, Germany
Period2019 Sept 17
Held atHelmholtz Association of German Research Centers, Germany, Berlin
Degree of RecognitionInternational