Real-time Monitoring of the Surface Chemistry of Atomic Layer Deposition by Ambient Pressure X-ray Photoelectron Spectroscopy

Activity: Talk or presentationInvited talk

Description

Invited speaker at the 66th International Symposium and Exhibition of the American Vacuum Society
Period2019 Oct 21
Event title66th International Symposium and Exhibition of the American Vacuum Society
Event typeConference
LocationColumbus, United States, OhioShow on map
Degree of RecognitionInternational