Hertz laboratory


    Infrastructure Details


    Small clean room for silicon, glass and polymer microfabrication.

    Equipment and resources

    Thermco Oxidation furnace, Heidelberg DWL66+ mask writer, Karl Süss MA4 mask aligner, Brewer 100CB spinner, Edwards auto306 metal evaporator, wet etching equipment, Micro Automation 602M dicing saw, Ambios XP-1 profilometer, microscopy.

    UKÄ subject classification

    • Engineering and Technology

    Type of infrastructure

    • Equipment