Hertz laboratory

Department of Biomedical Engineering

Infrastructure

    Infrastructure Details

    Description

    Small clean room for silicon, glass and polymer microfabrication.

    Equipment and resources

    Thermco Oxidation furnace, Heidelberg DWL66+ mask writer, Karl Süss MA4 mask aligner, Brewer 100CB spinner, Edwards auto306 metal evaporator, wet etching equipment, Micro Automation 602M dicing saw, Ambios XP-1 profilometer, microscopy.

    Subject classification (UKÄ)

    • Engineering and Technology

    Type of infrastructure

    • Equipment

    Contact information

    NameMartin Bengtsson
    Phone+46462229372
    Emails[email protected]
    LinksBooking/Management
    • 1 Organisation of workshop/ seminar/ course