Research output per year
Research output per year
Personal profile
Research
Research interests: technology of semiconductor nanostructures, including electron beam (EBL) and nanoimprint lithography (NIL), block copolymer (BCP) lithography, focused ion beams (FIB), low-energy reactive ion etching (RIE) techniques.
I work to develop nanoimprint infrastructure at LNL, which includes both methods and applications of nanoimprint in large-scale patterning for fabrication of III-V nanowires and other nano-devices.
I also work to develop novel, high-resolution methods of nano lithography based on block copolymers (BCP) to reach sub-10 nm features. One of possible applications of such lithography would be technology of ultra-small III-V nanowires.
Fingerprint
Dive into the research topics where Ivan Maximov is active. These topic labels come from the works of this person. Together they form a unique fingerprint.
- 1 Similar Profiles
Collaborations the last five years
Recent external collaboration on country/territory level. Dive into details by clicking on the dots or
-
Surface effects in quasiatomic layer etching of silicon
Danielsson, O., Karimi, A., Ilarionova, Y., Garnæs, J., Khan, S. A. & Maximov, I., 2025 Jul, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 43, 4, 042601.Research output: Contribution to journal › Article › peer-review
Open Access -
A Pathway Toward Sub-10 nm Surface Nanostructures Utilizing Block Copolymer Crystallization Control
Meinhardt, A., Qi, P., David, C., Maximov, I. & Keller, T. F., 2025 Mar 16, In: Advanced Materials Interfaces. 12, 6, 2400661.Research output: Contribution to journal › Article › peer-review
Open Access -
New high-resolution SiO2-based positive-tone resist for electron beam lithography
Cattoni, A., Mailly, D. & Maximov, I., 2023 Sept 27.Research output: Contribution to conference › Poster › peer-review
-
Damage Analysis of Reactive Ion and Quasi-Atomic Layer Etched Silicon
Karimi, A., Alabrash, M., Lishan, D., Jafari, R., Aslan, H., Garnæs, J., Uvarov, A., Ilarionova, Y., Suyatin, D., Sundqvist, J., Khan, S. & Maximov, I., 2023 Jul 26, (Unpublished).Research output: Contribution to conference › Abstract › peer-review
-
Comparison of UV-curable materials for high-resolution polymer nanoimprint stamps
Asif, M., Graczyk, M., Heidari, B. & Maximov, I., 2022 Feb 26, In: Micro and Nano Engineering. 14, 7 p., 100118.Research output: Contribution to journal › Article › peer-review
Open Access
Projects
- 2 Active
-
PhD project
Haettner, E. (Researcher), Maximov, I. (Supervisor) & Burke, A. (Assistant supervisor)
2025/02/01 → …
Project: Dissertation
-
Sentio: Integrated Sensors and Adaptive Technology for Sustainable Products and Manufacturing
Mikkelsen, A. (PI), Alm, A.-K. (Project coordinator), Windmark, C. (CoPI), Bushlya, V. (CoPI), Sandsten, M. (CoPI), Lenrick, F. (CoPI), Maximov, I. (CoPI), Kihl, M. (CoPI), Burke, A. (CoPI), Gutnichenko, O. (CoPI) & Behmanesh, B. (CoPI)
Swedish Government Agency for Innovation Systems (Vinnova)
2023/11/01 → 2028/12/31
Project: Research
Activities
-
Mini-workshop on atomic layer processing and Si-photonics
Maximov, I. (Organiser)
2023 Oct 13Activity: Participating in or organising an event › Organisation of workshop/ seminar/ course
-
NanoLund Annual Meeting 2023
Maximov, I. (Participant), Lindholm, A. (Organiser), Lindén, E. (Role not specified), Löfgren, A. (Role not specified) & Mikkelsen, A. (Host)
2023 Oct 10Activity: Participating in or organising an event › Participation in conference
-
Kulturnatten 2023
Maximov, I. (Organiser)
2023 Sept 16Activity: Participating in or organising an event › Organisation of public lecture/debate/seminar
-
Study of surface effects induced by quasi-atomic layer etching
Maximov, I. (First/primary/lead supervisor)
2023 Sept 15 → 2023 Dec 31Activity: Examination and supervision › Examination
-
EuroNanoForum 2023
Maximov, I. (Deputy chair)
2023 Jun 11 → 2023 Jun 12Activity: Participating in or organising an event › Participation in conference