Ivan Maximov

Search results

• 2021

  Sequential infiltration synthesis and pattern transfer using 6 nm half-pitch carbohydrate-based fingerprint block copolymer

  Löfstrand, A., Jafari Jam, R., Mumtaz, M., Mothander, K., Nylander, T., Vorobiev, A., Rahaman, A., Chen, W. C., Borsali, R. & Maximov, I., 2021, Advances in Patterning Materials and Processes XXXVIII. Sanders, D. P. & Guerrero, D. (eds.). SPIE, 116120W. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 11612).

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

  • Block Copolymer 100%
  • Aluminum Oxide 100%
  • Silicon 66%
  • Reactive Ion Etching 66%
  • Water 33%
• 2009

  Gate-defined quantum devices realized on an InGaAs/InP heterostructure by incorporating a high-kappa dielectric material

  Sun, J., Larsson, M., Maximov, I. & Xu, H., 2009, 2009 IEEE Nanotechnology Materials and Devices Conference. IEEE - Institute of Electrical and Electronics Engineers Inc., p. 183-185

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

  • Dielectrics 100%
  • Heterojunctions 100%
  • High-κ Dielectric 100%
  • Quantum Device 100%
  • Heterojunction 100%
• 2008

  Novel room-temperature functional analogue and digital nanoelectronic circuits based on three-terminal ballistic junctions and planar quantum-wire transistors

  Sun, J., Wallin, D., Brusheim, P., Maximov, I. & Xu, H., 2008, Journal of Physics: Conference Series. IOP Publishing, Vol. 100. p. 052073

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

  Open Access

  • Networks (Circuits) 100%
  • Transistor 100%
  • Room Temperature 100%
  • Nanoelectronics 100%
  • Terminal Ballistics 100%
• 2007

  Novel nanoelectronic device applications based on the nonlinearity of three-terminal ballistic junctions

  Sun, J., Wallin, D., Brusheim, P., Maximov, I., Wang, Z. G. & Xu, H., 2007, Physics of Semiconductors, Pts A and B. American Institute of Physics (AIP), Vol. 893. p. 1471-1472

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

  • Devices 100%
  • Temperature 25%
  • Detector 25%
  • Gas 25%
  • Lithography 25%
• 2006

  An electrically tunable interdigitated cantilever array fabricated by nanoimprint lithography

  Luo, G., Ghatnekar-Nilsson, S., Maximov, I., Graczyk, M., Carlberg, P., Adolph, D., Hessman, D., Zhu, T., Liu, Z. F., Xu, H. & Montelius, L., 2006, Book of abstracts: Intl Conf on Nanoimprint and Nanoprint Technology, San Fransisco, Ca, USA (2006).

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

• Fabrication and electron transport study of three-terminal InAs nanowire junctions

  Suyatin, D., Wallin, D., Fröberg, L., Karlsson, L., Maximov, I., Wallenberg, R., Xu, H. & Samuelson, L., 2006, Book of extended abstracts: 14th Intl Symp “Nanostructures: Physics and Technology”, St Petersburg, Russia (2006).

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

• Nanoimprint and reactive etching for fabrication of Si/SiO2 NEMS structures

  Luo, G., Maximov, I., Ghatnekar-Nilsson, S., Adolph, D., Graczyk, M., Carlberg, P., Hessman, D., Zhu, T., Liu, Z. F., Xu, H. & Montelius, L., 2006, Book of extended abstracts: 14th Intl Symp “Nanostructures: Physics and Technology”, St Petersburg, Russia (2006).

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

• Nanoimprint-based fabrication and characterization of interdigitated cantilevver array

  Luo, G., Ghatnekar-Nilsson, S., Maximov, I., Graczyk, M., Carlberg, P., Adolph, D., Hessman, D., Zhu, T., Liu, Z., Xu, H. & Montelius, L., 2006, Book of abstracts: Intl Conf on Nanosci and Technol, Basel, Switzerland (2006).

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

• Novel nanoelectronic device applications based on the non-linearity of three-terminal ballistic junctions

  Sun, J., Wallin, D., Brusheim, P., Maximov, I. & Xu, H., 2006, Book of abstracts: 28th Intl Conf Physics Semiconductors, Vienna, Austria (2006).

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

• Synthesis and characterization of cobalt silicide films on silicon

  Joensson, C. T., Maximov, I., Whitlow, H. J., Shutthanandan, V., Saraf, L., McCready, D. E., Arey, B. W., Zhang, Y. & Thevuthasan, S., 2006, Ion Beam Analysis - Proceedings of the Seventeenth International Conference on Ion Beam Analysis (Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms). Elsevier, Vol. 249. p. 532-535

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

  • Temperature 100%
  • Characterization 100%
  • Silicon 100%
  • Film 100%
  • Cobalt 100%
• 2005

  An alignment procedure for nanoimprint lithography at the sub-20 nm level

  Adolph, D., Bolmsjö, E., Theander, E., Saers, R., Graczyk, M., Hessman, D., Maximov, I., Andersson-Engels, S., Persson, A., Wahlström, C.-G., Beck, M., Carlberg, P., Heidari, B. & Montelius, L., 2005, Book of extended abstracts: 49th Intl Conf on Electron, Ion, and Photon Beam Technol and Nanofabr, Orlando, Fl, USA (2005).

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding

• Electrical contacts technology for single nanowires and molecules

  Suyatin, D., Björk, M., Thelander, C., Bunk, R., Maximov, I. & Samuelson, L., 2005, Book of extended abstracts: Niels Bohr Summer School, Copenhagen, Denmark (2005).

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

• Nanoimprint technology for fabrication of tunable grating structures

  Luo, G., Maximov, I., Graczyk, M., Adolph, D., Carlberg, P., Zhu, T., Liu, Z., Xu, H. & Montelius, L., 2005, Book of extended abstracts: 31st Intl Conf Micro- and Nano-Engineering, Vienna, Austria (2005).

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

• Sulfur passivation for formation of Ohmic contacts to InAs nanowire devices

  Suyatin, D., Björk, M., Thelander, C., Maximov, I. & Samuelson, L., 2005, Book of extended abstracts: 31st Intl Conf Micro- and Nano-Engineering, Vienna, Austria (2005).

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review
• 2004

  Diode-like characteristics of nanometer-scale semiconductor channels with a broken symmetry

  Song, A., Maximov, I., Missous, M. & Seifert, W., 2004, Proceedings of the Eleventh International Conference on Modulated Semiconductor Structures (Physica E: Low-dimensional Systems and Nanostructures). Elsevier, Vol. 21. p. 1116-1120

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

  • Characteristics 100%
  • Nanometre 100%
  • Semiconductor 100%
  • Devices 100%
  • Semiconductor Material 100%

• Diode-like characteristics of nanometer-scale semiconductor channels with broken symmetry

  Song, A., Maximov, I., Missous, M. & Seifert, W., 2004, Physica E 21, 1116-1120 (2004).

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

• Nanoelectrochemical transducers for (bio-) chemical sensor applications fabricated by nanoimprint lithography

  Beck, M., Persson, F., Carlberg, P., Graczyk, M., Maximov, I., Ling, T. G. I. & Montelius, L., 2004, Microelectr Engin 73-74, 837-842 (2004).

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding

• Nanoimprint - a tool for realizing nano-bio research

  Carlberg, P., Johansson, F., Mårtensson, T., Bunk, R., Beck, M., Persson, F., Borgström, M., Nilsson, S. G., Heidari, B., Grazcyk, M., Maximov, I., Sarwe, E.-L., Ling, T., Mansson, A., Kanje, M., Seifert, W., Samuelson, L. & Montelius, L., 2004, 2004 4th IEEE Conference on Nanotechnology. IEEE - Institute of Electrical and Electronics Engineers Inc., p. 199-200

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

  • Surface 100%
  • Lithography 100%
  • Linewidth 100%

• Nanoimprint – a tool for realizing nano-bio research

  Carlberg, P., Johansson, F., Mårtensson, T., Beck, M., Persson, F., Nilsson, S. G., Bunk, R., Borgström, M., Graszyk, M., Maximov, I., Sarwe, E.-L., Ling, T. G. I., Månsson, A., Kanje, M., Seifert, W., Samuelson, L. & Montelius, L., 2004, Book of extended abstracts: 8th Intl Conf Nanoscale Sci Technol, Venice, Italy (2004).

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

• Room-temperature nanoelectronic logic devices with ballistic junctions

  Xu, H., Wallin, D., Shorubalko, I., Maximov, I., Omling, P. & Samuelson, L., 2004, Book of extended abstracts: 8th Intl Conf Nanoscale Sci Technol, Venice, Italy (2004).

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review
• 2003

  Fluorescence microscopy for quality control in nanoimprint lithography

  Finder, C., Beck, M., Seekamp, J., Pfeiffer, K., Carlberg, P., Maximov, I., Reuther, F., Sarwe, E.-L., Zankovich, S., Ahopelto, J., Montelius, L., Mayer, C. & Torres, C., 2003, Microelectronic Engineering (Proceedings of the 28th International Conference on Micro- and Nano-Engineering). Elsevier, Vol. 67-8. p. 623-628

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

  • Size 100%
  • Microscopy 100%
  • Quality Control 100%
  • Lithography 100%
  • Polymers 100%

• Lift-off process for nanoimprint lithography

  Carlberg, P., Graczyk, M., Sarwe, E.-L., Maximov, I., Beck, M. & Montelius, L., 2003, Microelectronic Engineering. Elsevier, Vol. 67-8. p. 203-207 5 p.

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

  • Polymethyl Methacrylate 100%
  • Lithography 100%
  • Nanoimprint Lithography 100%
  • Metal 100%
  • Pattern Transfer 50%

• Metal nanoelectrodes for molecular transistor and investigation of electron transport in molecular systems.

  Suyatin, D., Soldatov, E. S., Maximov, I., Montelius, L., Samuelson, L., Khomutov, G. B., Gubin, S. P. & Sergeev-Cherenkov, A. N., 2003, [Host publication title missing]. Alferov, Z. I. & Esaki, L. (eds.). SPIE, Vol. 5023. p. 327-329 3 p.

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding

  • Metal 100%
  • Electron Transfer 100%
  • Transistor 100%
  • Nanoelectrode 100%
  • Temperature 50%
• 2002

  A novel frequency-doubling device based on three-terminal ballistic junction

  Shorubalko, I., Xu, H., Maximov, I., Nilsson, D., Omling, P., Samuelson, L. & Seifert, W., 2002, Device Research Conference (Cat. No.02TH8606). IEEE - Institute of Electrical and Electronics Engineers Inc., p. 159-160

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

  • Devices 100%
  • Terminal Ballistics 100%
  • Electrical Property 66%
  • Novel Device 66%
  • Electrical Properties 50%

• Fabrication of Si-based nanoimprint stamps with sub-20 nm features

  Maximov, I., Sarwe, E.-L., Beck, M., Deppert, K., Graczyk, M., Magnusson, M. & Montelius, L., 2002, MICROELECTRONIC ENGINEERING. Elsevier, Vol. 61-2. p. 449-454

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

  • Lithography 100%
  • Particle 66%
  • Aerosol 66%
  • Gas 33%
  • Poly Methyl Methacrylate 33%

• Investigation of polymethylmethacrylate resist residues using photoelectron microscopy

  Maximov, I., Zakharov, A., Holmqvist, T., Montelius, L. & Lindau, I., 2002, Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. American Institute of Physics (AIP), Vol. 20. p. 1139-1142

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

  • Microscopy 100%
  • Development 33%

• Nanoimprint in mr-L 6000.1 XP/PMMA resist system

  Carlberg, P., Beck, M., Graczyk, M., Maximov, I., Sarwe, E.-L., Montelius, L., Pfeiffer, K., Reuther, F. & Gruetzner, G., 2002, 7th International Conference on Nanometer-Scale Science and Technology and 21st European Conference on Surface Science. Lund University, 2 p.

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

  • Superconducting Transition Temperature 100%
  • Lithography 100%
  • Poly Methyl Methacrylate 100%
  • Poly(methyl Methacrylate) Macromolecule 100%
  • Glass Transition Temperature 33%

• New high resolution negative resist mr-L 6000.1 XP for electron beam and nanoimprint lithography

  Maximov, I., Beck, M., Carlberg, P., Montelius, L., Pfeiffer, K., Reuther, F., Gruetzer, G., Schulz, H., Wissen, M. & Scheer, H.-C., 2002, 7th International Conference on Nanometer-Scale Science and Technology and 21st European Conference on Surface Science. Lund University, 2 p.

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

  • Nanoimprint Lithography 100%
  • Electron Optical Lithography 100%
  • Lithography 100%
  • Development 50%
  • Feature Size 50%

• Next generation nanotechnologies for sensor array fabrication

  Montelius, L., Beck, M., Ling, T., Carlberg, P., Graczyk, M., Maximov, I. & Sarwe, E.-L., 2002, 7th International Conference on Nanometer-Scale Science and Technology and 21st European Conference on Surface Science. Lund University, 2 p.

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

  • Electrode 100%
  • Lithography 100%
  • Devices 33%

• Quantative photoelectron spectromicroscopy for investigation of PMMA resist residues

  Zakharov, A., Maximov, I., Holmqvist, T., Montelius, L. & Lindau, I., 2002, 7th International Conference on Nanometer-Scale Science and Technology and 21st European Conference on Surface Science. Lund University, 2 p.

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

  • Photoelectron 100%
  • Poly(methyl Methacrylate) Macromolecule 100%
  • Poly Methyl Methacrylate 100%
  • Procedure 66%
  • Engineering Process 33%

• Three-terminal ballistic junctions: new building blocks for functional devices in nanoelectronics

  Xu, H., Shorubalko, I., Maximov, I., Seifert, W., Omling, P. & Samuelson, L., 2002, 7th International Conference on Nanometer-Scale Science and Technology and 21st European Conference on Surface Science. Lund University, 2 p.

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

  • Building Block 100%
  • Nanoelectronics 100%
  • Terminal Ballistics 100%
  • Devices 100%
  • Electrical Property 33%