Ivan Maximov

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2023
Damage Analysis of Reactive Ion and Quasi-Atomic Layer Etched Silicon
Karimi, A., Alabrash, M., Lishan, D., Jafari, R., Aslan, H., Garnæs, J., Uvarov, A., Ilarionova, Y., Suyatin, D., Sundqvist, J., Khan, S. & Maximov, I., 2023 Jul 26, (Unpublished).
Research output: Contribution to conference › Abstract › peer-review
2018
Block Copolymer Nanopatterning of Dielectric Mask for Selective Area InAs Vertical Nanowire Growth
Löfstrand, A., Graczyk, M., Suyatin, D., Kvennefors, A., Maximov, I., Svensson, J. & Wernersson, L.-E., 2018, (Unpublished).
Research output: Contribution to conference › Abstract

Research output