Lars Montelius

Search results

• 2020

  Adsorption of 3-(triethoxysilyl)propionitrile on a rutile TiO₂(110) surface: An X-ray photoelectron spectroscopy study

  Chaudhary, S., Head, A. R., Johansson, N., Snezhkova, O., Ye, L., Montelius, L. & Schnadt, J., 2020, DAE Solid State Physics Symposium 2019. Sharma, V. K., Prajapat, C. L. & Yusuf, S. M. (eds.). American Institute of Physics (AIP), 030298. (AIP Conference Proceedings; vol. 2265).

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

  • Adsorption 100%
  • X-Ray Photoelectron Spectroscopy 100%
  • Ray Photoelectron Spectroscopy 100%
  • Titanium Dioxide 100%
  • Oxygen 37%
• 2011

  Molecularly selective nanopatterns using nanoimprint lithography: A label-free sensor architecture

  Forchheimer, D., Luo, G., Ye, L. & Montelius, L., 2011, Journal of Vacuum Science & Technology B. American Vacuum Society, Vol. 29.

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

  • Lithography 100%
  • Polymers 66%
  • Nanocrystalline Material 33%
  • Polymer Structure 33%
• 2010

  Nano-Schottky Contacts Realized by Bottom-up Technique

  Suyatin, D., Trägårdh, J., Messing, M., Wagner, J., Montelius, L., Pettersson, H. & Samuelson, L., 2010, INEC: 2010 3rd International Nanoelectronics Conference, vols 1 and 2. IEEE - Institute of Electrical and Electronics Engineers Inc., p. 252-253

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

  • Particle 100%
  • Schottky Barrier 100%
  • Side 66%
  • Fast Response 50%
  • Heterojunctions 50%
• 2009

  Negative UV–NIL (NUV–NIL) – A mix-and-match NIL and UV strategy for realisation of nano- and micrometre structures

  Skjolding, L. H., Turon Teixidor, G., Emnéus, J. & Montelius, L., 2009, Microelectronic Engineering. Elsevier, Vol. 86. p. 654-656

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

  • Lithography 100%
  • Electrode 33%
  • Resin 33%
• 2008

  AFM-based manipulation of InAs nanowires

  Conache, G., Gray, S., Bordag, M., Ribayrol, A., Fröberg, L., Samuelson, L., Pettersson, H. & Montelius, L., 2008, Journal of Physics: Conference Series. IOP Publishing, Vol. 100. p. 052051

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

  Open Access

  • Nanowire 100%
  • Surface 33%
  • Wire 33%

• Characterisation of nano-interdigitated electrodes

  Skjolding, L. H., Spegel, C., Ribayrol, A., Emnéus, J. & Montelius, L., 2008, Journal of Physics: Conference Series. IOP Publishing, Vol. 100. p. 052045

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

  Open Access

  • Lithography 100%

• Nanomodified surfaces and guidance of nerve cell processes

  Johansson, F., Hällström, W., Gustavsson, P., Wallman, L., Prinz, C., Montelius, L. & Kanje, M., 2008, Journal of Vacuum Science and Technology B. American Institute of Physics (AIP), Vol. 26. p. 2558-2561

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

  • Nanostructured Surface 100%
  • Surface 100%
  • Porous Silicon 50%
  • Phosphide 50%
  • Nanowire 50%
• 2006

  An electrically tunable interdigitated cantilever array fabricated by nanoimprint lithography

  Luo, G., Ghatnekar-Nilsson, S., Maximov, I., Graczyk, M., Carlberg, P., Adolph, D., Hessman, D., Zhu, T., Liu, Z. F., Xu, H. & Montelius, L., 2006, Book of abstracts: Intl Conf on Nanoimprint and Nanoprint Technology, San Fransisco, Ca, USA (2006).

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

• Elasticity of macroscopic isotropic media applied to nano-cantilevers

  Søndergaard, N., Ghatnekar-Nilsson, S., Guhr, T. & Montelius, L., 2006, Book of abstracts: Intl Conf on Nanosci and Technol, Basel, Switzerland (2006).

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

• Guiding axons using nanowires

  Prinz, C., Hällström, W., Svensson, P., Mårtensson, T., Montelius, L., Samuelson, L. & Kanje, M., 2006, Book of abstracts: 2nd Intl Symp on Semicond Nanowires, Lund, Sweden (2006).

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

• Guiding nerve cells with nanowires

  Prinz, C., Hällström, W., Svensson, P., Mårtensson, T., Montelius, L., Samuelson, L. & Kanje, M., 2006, Book of abstracts: Intl Conf on Nanosci and Technol, Basel, Switzerland (2006).

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

• Instant multi-frequency response from an array of nanomechanical cantilevers

  Ghatnekar-Nilsson, S., Graham, J., Coleman, J., Hull, R. & Montelius, L., 2006, Book of abstracts: Intl Conf on Nanosci and Technol, Basel, Switzerland (2006).

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

• Instant multi-frequency response from an array of nanomechanical cantilevers

  Ghatnekar-Nilsson, S. & Montelius, L., 2006, Book of abstracts: Intl Conf on Nanoimprint and Nanoprint Technology, San Fransisco, Ca, USA (2006).

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

• Investigation of Casimir/van der Waals forces between CNTs/NWs and a patterned Si/SiO2 substrate

  Ribayrol, A., Conache, G., Hernández, R., Rius i Riu, J., Fröberg, L., Jede, R., Schmucker, U., Zubtsov, M., Bordag, M., Pettersson, H. & Montelius, L., 2006, Book of abstracts: Intl Conf on Nanosci and Technol, Basel, Switzerland (2006).

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

• Nanoimprint and reactive etching for fabrication of Si/SiO2 NEMS structures

  Luo, G., Maximov, I., Ghatnekar-Nilsson, S., Adolph, D., Graczyk, M., Carlberg, P., Hessman, D., Zhu, T., Liu, Z. F., Xu, H. & Montelius, L., 2006, Book of extended abstracts: 14th Intl Symp “Nanostructures: Physics and Technology”, St Petersburg, Russia (2006).

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

• Nanoimprint-based fabrication and characterization of interdigitated cantilevver array

  Luo, G., Ghatnekar-Nilsson, S., Maximov, I., Graczyk, M., Carlberg, P., Adolph, D., Hessman, D., Zhu, T., Liu, Z., Xu, H. & Montelius, L., 2006, Book of abstracts: Intl Conf on Nanosci and Technol, Basel, Switzerland (2006).

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

• Nano imprint lithography and fast fourier transform for guiding and quantifying neurons and their extensions

  Carlberg, P., Johanssen, F., Kanje, M. & Montelius, L., 2006, Book of abstracts: Intl Conf on Nanoimprint and Nanoprint Technology, San Fransisco, Ca, USA (2006).

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

• Nano imprint lithography and fast Fourier transform for guiding and quantifying neurons and their extensions

  Carlberg, P., Johansson, F., Kanje, M. & Montelius, L., 2006, Book of abstracts: Intl Conf on Nanosci and Technol, Basel, Switzerland (2006).

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

• Nanoimprint lithography for nanomechanics, electronics and life science applications

  Montelius, L., 2006, Book of abstracts: Intl Conf on Nanoimprint and Nanoprint Technology, San Fransisco, Ca, USA (2006).

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

• Nanoimprint lithography for nanomechanics, electronics and life-science applications

  Montelius, L., 2006, Book of extended abstracts: 32nd Intl Conf Micro- and Nano-Engineering, Barcelona, Spain (2006), invited.

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review
• 2005

  An alignment procedure for nanoimprint lithography at the sub-20 nm level

  Adolph, D., Bolmsjö, E., Theander, E., Saers, R., Graczyk, M., Hessman, D., Maximov, I., Andersson-Engels, S., Persson, A., Wahlström, C.-G., Beck, M., Carlberg, P., Heidari, B. & Montelius, L., 2005, Book of extended abstracts: 49th Intl Conf on Electron, Ion, and Photon Beam Technol and Nanofabr, Orlando, Fl, USA (2005).

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding

• Fully integrated nanoresonator system with attogram/Hz mass resolution

  Forsén, E., Abadal, G., Nilsson, S. G., Verd, J., Sandberg, R., Svendsen, W., Teva, J., Pérez-Murano, F., Esteve, J., Figueras, E., Campabadal, F., Montelius, L., Barniol, N. & Boisen, A., 2005, Book of extended abstracts: 18th IEEE Intl Conf on Microelectromech Systems, Miami, Fl, USA (2005).

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

• Nanoimprint lithography and life science applications

  Montelius, L., Carlberg, P., Bunk, R., Sundberg, M., Rosengren, J., Nicholls, I., Tågerud, S., Omling, P., Månsson, A., Hällström, W., Prinz, C., Samuelson, L., Johansson, F. & Kanje, M., 2005, Book of extended abstracts: 31st Intl Conf Micro- and Nano-Engineering, Vienna, Austria (2005), invited.

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

• Nanoimprint technology for fabrication of tunable grating structures

  Luo, G., Maximov, I., Graczyk, M., Adolph, D., Carlberg, P., Zhu, T., Liu, Z., Xu, H. & Montelius, L., 2005, Book of extended abstracts: 31st Intl Conf Micro- and Nano-Engineering, Vienna, Austria (2005).

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

• The use of nanoimprint lithography for creation of biomaterial surfaces and structures

  Montelius, L., Carlberg, P., Bunk, R., Sundberg, M., Rosengren, J., Nicholls, I., Tågerud, S., Månsson, A., Hällström, W., Prinz, C., Johansson, F. & Kanje, M., 2005, Book of abstracts: MRS Fall Meet, Boston, Ma, USA, 2005, invited.

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review
• 2004

  Dry release of suspended nanostructures

  Forsén, E., Davis, Z. J., Dong, M., Nilsson, S. G., Montelius, L. & Boisen, A., 2004, Microelectr Engin 73-74, 487-490 (2004).

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

• Fabrication and AFM-characterization of nanocantilevers to be used as mass sensors

  Nilsson, S. G., Borrise, X. & Montelius, L., 2004, Book of extended abstracts: 1st Workshop on Nanomechan Sensors, Madrid, Spain (2004).

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

• Fabrication of cantilever based mass sensors inteagrated with CMOS using direct write laser lithography on resist

  Forsén, E., Nilsson, S. G., Carlberg, P., Abadal, G., Pérez-Murano, F., Esteve, J., Montserrat, J., Figueras, E., Campabadal, F., Verd, J., Montelius, L., Barniol, N. & Boisen, A., 2004, Nanotechnol 15, S628-S633 (2004).

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

• Laser lithography on resist bi-layer for nanoelectromechanical systems prototyping

  Forsén, E., Carlberg, P., Montelius, L. & Boisen, A., 2004, Microelectr Engin 73-74, 491-495 (2004).

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

• Nanoelectrochemical transducers for (bio-) chemical sensor applications fabricated by nanoimprint lithography

  Beck, M., Persson, F., Carlberg, P., Graczyk, M., Maximov, I., Ling, T. G. I. & Montelius, L., 2004, Microelectr Engin 73-74, 837-842 (2004).

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding

• Nanoimprint - a tool for realizing nano-bio research

  Carlberg, P., Johansson, F., Mårtensson, T., Bunk, R., Beck, M., Persson, F., Borgström, M., Nilsson, S. G., Heidari, B., Grazcyk, M., Maximov, I., Sarwe, E.-L., Ling, T., Mansson, A., Kanje, M., Seifert, W., Samuelson, L. & Montelius, L., 2004, 2004 4th IEEE Conference on Nanotechnology. IEEE - Institute of Electrical and Electronics Engineers Inc., p. 199-200

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

  • Surface 100%
  • Lithography 100%
  • Linewidth 100%

• Nanoimprint – a tool for realizing nano-bio research

  Carlberg, P., Johansson, F., Mårtensson, T., Beck, M., Persson, F., Nilsson, S. G., Bunk, R., Borgström, M., Graszyk, M., Maximov, I., Sarwe, E.-L., Ling, T. G. I., Månsson, A., Kanje, M., Seifert, W., Samuelson, L. & Montelius, L., 2004, Book of extended abstracts: 8th Intl Conf Nanoscale Sci Technol, Venice, Italy (2004).

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

• Nanoimprint lithography and its applications from molecular motors to quantum devices

  Montelius, L., 2004, Book of abstracts: 1st Nano-Engineering and Nano-Science Congress, Singapore (2004), invited.

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

• Nanotechnology and actomyosin motility in vitro on different surface chemistries

  Månsson, A., Sundberg, M., Bunk, R., Balaz, M., Rosengren, J. P., Lindahl, J., Nicholls, I. A., Omling, P., Tågerud, S. & Montelius, L., 2004, Biophysical J 86, 58A (2004).

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

• Nanowire arrays - a toolbox for the future

  Mårtensson, T., Borgström, M., Carlberg, P., Dick Thelander, K., Montelius, L., Seifert, W. & Samuelson, L., 2004, Book of extended abstracts: 8th Intl Conf Nanoscale Sci Technol, Venice, Italy (2004).

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

• Overview: nanotechnology in life science

  Montelius, L., 2004, NSF/SSF Workshop on Nanoscience and Nanotechnology, Lund, Sweden (2004).

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

• Process development and characterization of antisticking layers on nickel-based stamps designed for nanoimprint lithography

  Keil, M., Beck, M., Frennesson, G., Theander, E., Bolmsjö, E., Montelius, L. & Heidari, B., 2004, J Vac Sci Technol B 22, 3283-3287 (2004).

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review
• 2003

  Fluorescence microscopy for quality control in nanoimprint lithography

  Finder, C., Beck, M., Seekamp, J., Pfeiffer, K., Carlberg, P., Maximov, I., Reuther, F., Sarwe, E.-L., Zankovich, S., Ahopelto, J., Montelius, L., Mayer, C. & Torres, C., 2003, Microelectronic Engineering (Proceedings of the 28th International Conference on Micro- and Nano-Engineering). Elsevier, Vol. 67-8. p. 623-628

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

  • Size 100%
  • Microscopy 100%
  • Quality Control 100%
  • Lithography 100%
  • Polymers 100%

• Lift-off process for nanoimprint lithography

  Carlberg, P., Graczyk, M., Sarwe, E.-L., Maximov, I., Beck, M. & Montelius, L., 2003, Microelectronic Engineering. Elsevier, Vol. 67-8. p. 203-207 5 p.

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

  • Polymethyl Methacrylate 100%
  • Lithography 100%
  • Nanoimprint Lithography 100%
  • Metal 100%
  • Pattern Transfer 50%

• Metal nanoelectrodes for molecular transistor and investigation of electron transport in molecular systems.

  Suyatin, D., Soldatov, E. S., Maximov, I., Montelius, L., Samuelson, L., Khomutov, G. B., Gubin, S. P. & Sergeev-Cherenkov, A. N., 2003, [Host publication title missing]. Alferov, Z. I. & Esaki, L. (eds.). SPIE, Vol. 5023. p. 327-329 3 p.

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding

  • Metal 100%
  • Electron Transfer 100%
  • Transistor 100%
  • Nanoelectrode 100%
  • Temperature 50%

• Nanoimprint-induced effects on electrical and optical properties of quantum well structures

  Zankovych, S., Maximov, I., Shorubalko, I., Seekamp, J., Beck, M., Romanov, S., Reuter, D., Schafmeister, P., Wieck, A., Ahopelto, J., Torres, C. & Montelius, L., 2003, Microelectronic Engineering (Proceedings of the 28th International Conference on Micro- and Nano-Engineering). Elsevier, Vol. 67-8. p. 214-220

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

  • Temperature 100%
  • Electrical Property 100%
  • Lithography 100%
  • Optical Property 100%
  • Quantum Well 100%
• 2002

  Fabrication and characterization of a molecular adhesive layer for micro- and nanofabricated electrochemical electrodes

  Beck, M., Bunk, R., Forzen, E., Tegenfeldt, J., Ling, T. G. I. & Montelius, L., 2002, 7th International Conference on Nanometer-Scale Science and Technology and 21st European Conference on Surface Science. Lund University, 2 p.

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

  • Characterization 100%
  • Electrode 100%
  • Monolayers 100%
  • Surface 50%
  • Metal 50%

• Fabrication of Si-based nanoimprint stamps with sub-20 nm features

  Maximov, I., Sarwe, E.-L., Beck, M., Deppert, K., Graczyk, M., Magnusson, M. & Montelius, L., 2002, MICROELECTRONIC ENGINEERING. Elsevier, Vol. 61-2. p. 449-454

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

  • Lithography 100%
  • Particle 66%
  • Aerosol 66%
  • Gas 33%
  • Poly Methyl Methacrylate 33%

• Investigation of polymethylmethacrylate resist residues using photoelectron microscopy

  Maximov, I., Zakharov, A., Holmqvist, T., Montelius, L. & Lindau, I., 2002, Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. American Institute of Physics (AIP), Vol. 20. p. 1139-1142

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

  • Microscopy 100%
  • Development 33%

• Nanoimprint in mr-L 6000.1 XP/PMMA resist system

  Carlberg, P., Beck, M., Graczyk, M., Maximov, I., Sarwe, E.-L., Montelius, L., Pfeiffer, K., Reuther, F. & Gruetzner, G., 2002, 7th International Conference on Nanometer-Scale Science and Technology and 21st European Conference on Surface Science. Lund University, 2 p.

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

  • Superconducting Transition Temperature 100%
  • Lithography 100%
  • Poly Methyl Methacrylate 100%
  • Poly(methyl Methacrylate) Macromolecule 100%
  • Glass Transition Temperature 33%

• Nanoimprint lithography: opportunities and applications

  Montelius, L., 2002, Digest of Papers. Microprocesses and Nanotechnology 2002. 2002 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.02EX589). Japan Soc. Appl. Phys, p. 18-19

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

  • Nanoimprint Lithography 100%
  • Lithography 100%
  • Devices 40%
  • Fabrication 20%
  • Electronic Devices 20%

• New high resolution negative resist mr-L 6000.1 XP for electron beam and nanoimprint lithography

  Maximov, I., Beck, M., Carlberg, P., Montelius, L., Pfeiffer, K., Reuther, F., Gruetzer, G., Schulz, H., Wissen, M. & Scheer, H.-C., 2002, 7th International Conference on Nanometer-Scale Science and Technology and 21st European Conference on Surface Science. Lund University, 2 p.

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

  • Nanoimprint Lithography 100%
  • Electron Optical Lithography 100%
  • Lithography 100%
  • Development 50%
  • Feature Size 50%

• Next generation nanotechnologies for sensor array fabrication

  Montelius, L., Beck, M., Ling, T., Carlberg, P., Graczyk, M., Maximov, I. & Sarwe, E.-L., 2002, 7th International Conference on Nanometer-Scale Science and Technology and 21st European Conference on Surface Science. Lund University, 2 p.

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

  • Electrode 100%
  • Lithography 100%
  • Devices 33%

• Photon mapping of single quantum dots by scanning tunneling microscopy induced luminescence spectroscopy

  Håkanson, U., Johansson, M.-J., Holm, M., Persson, J., Sass, T., Pistol, M.-E., Montelius, L. & Samuelson, L., 2002, 7th International Conference on Nanometer-Scale Science and Technology and 21st European Conference on Surface Science. Lund University, 2 p.

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

  • Luminescence 100%
  • Quantum Dot 100%
  • Microscopy 100%
  • Theoretical Calculation 33%
  • Photoluminescence 33%

• Quantative photoelectron spectromicroscopy for investigation of PMMA resist residues

  Zakharov, A., Maximov, I., Holmqvist, T., Montelius, L. & Lindau, I., 2002, 7th International Conference on Nanometer-Scale Science and Technology and 21st European Conference on Surface Science. Lund University, 2 p.

  Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

  • Photoelectron 100%
  • Poly(methyl Methacrylate) Macromolecule 100%
  • Poly Methyl Methacrylate 100%
  • Procedure 66%
  • Engineering Process 33%