A method for selective etching of nanostructures

Md Sabbir Ahmed Khan (Inventor), Jonas Sundqvist (Inventor), Dmitry Suyatin (Inventor)

Research output: Patent

211 Downloads (Pure)

Subject classification (UKÄ)

@misc{5d134b2ef41d44859804e72d87765453,

title = "A method for selective etching of nanostructures",

author = "Khan, {Md Sabbir Ahmed} and Jonas Sundqvist and Dmitry Suyatin",

note = "US Patent App. 16/084,992; US 2019 / 0080918 A1",

year = "2019",

month = mar,

day = "14",

language = "English",

publisher = "Google Patents",

type = "Patent",

}