Abstract
The formation conditions, structure, and properties of the recently discovered phosphide, Si12P5 (initially assigned Si7P3), have been studied using x-ray diffraction, high-resolution transmission electron microscopy, photospectrometry, and a four-point probe. The phosphide formed in amorphous Si-P alloy thin films with 30, 35 and 44 at. % P after annealing at 1000°C for 30 min. During annealing at 1100°C, the phosphide dissociated through P evaporation. The Si12P5 phase is proposed to have rhombohedral symmetry with a P31m space group and a C5W12 structure. The hexagonal lattice parameters measured were a = 6.16±0.05 Å and c = 13.17±0.01 Å. The optical band gap and the electrical resistivity of the phosphide were determined to be 1.55 eV and 5 mΩ cm, respectively. The Gibbs free energy diagram for the Si-P system was modified to include this new Si12P5 phase.
Original language | English |
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Pages (from-to) | 394-401 |
Number of pages | 8 |
Journal | Journal of Vacuum Science and Technology A |
Volume | 15 |
Issue number | 2 |
DOIs | |
Publication status | Published - 1997 Mar 1 |
Subject classification (UKÄ)
- Condensed Matter Physics (including Material Physics, Nano Physics)
- Inorganic Chemistry