An electrically tunable interdigitated cantilever array fabricated by nanoimprint lithography

Gang Luo; Sara Ghatnekar-Nilsson; Ivan Maximov; Mariusz Graczyk; Patrick Carlberg; David Adolph; Dan Hessman; T Zhu; Z F Liu; Hongqi Xu; Lars Montelius

An electrically tunable interdigitated cantilever array fabricated by nanoimprint lithography

Gang Luo, Sara Ghatnekar-Nilsson, Ivan Maximov, Mariusz Graczyk, Patrick Carlberg, David Adolph, Dan Hessman, T Zhu, Z F Liu, Hongqi Xu, Lars Montelius

Solid State Physics

Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

Original language	English
Title of host publication	Book of abstracts: Intl Conf on Nanoimprint and Nanoprint Technology, San Fransisco, Ca, USA (2006)
Publication status	Published - 2006
Event	Intl Conf on Nanoimprint and Nanoprint Technology, 2006 - San Fransisco, Ca, United States Duration: 2006 Nov 15 → 2011 Nov 17

Conference

Conference	Intl Conf on Nanoimprint and Nanoprint Technology, 2006
Country/Territory	United States
City	San Fransisco, Ca
Period	2006/11/15 → 2011/11/17

Subject classification (UKÄ)

Condensed Matter Physics

Cite this

@inproceedings{968770c5ce994ec9a2387e323cc2c4d9,

title = "An electrically tunable interdigitated cantilever array fabricated by nanoimprint lithography",

author = "Gang Luo and Sara Ghatnekar-Nilsson and Ivan Maximov and Mariusz Graczyk and Patrick Carlberg and David Adolph and Dan Hessman and T Zhu and Liu, {Z F} and Hongqi Xu and Lars Montelius",

year = "2006",

language = "English",

booktitle = "Book of abstracts: Intl Conf on Nanoimprint and Nanoprint Technology, San Fransisco, Ca, USA (2006)",

note = "Intl Conf on Nanoimprint and Nanoprint Technology, 2006 ; Conference date: 15-11-2006 Through 17-11-2011",

}

Luo, G, Ghatnekar-Nilsson, S, Maximov, I, Graczyk, M, Carlberg, P, Adolph, D, Hessman, D, Zhu, T, Liu, ZF, Xu, H & Montelius, L 2006, An electrically tunable interdigitated cantilever array fabricated by nanoimprint lithography. in Book of abstracts: Intl Conf on Nanoimprint and Nanoprint Technology, San Fransisco, Ca, USA (2006). Intl Conf on Nanoimprint and Nanoprint Technology, 2006, San Fransisco, Ca, United States, 2006/11/15.

An electrically tunable interdigitated cantilever array fabricated by nanoimprint lithography. / Luo, Gang; Ghatnekar-Nilsson, Sara; Maximov, Ivan et al.

Book of abstracts: Intl Conf on Nanoimprint and Nanoprint Technology, San Fransisco, Ca, USA (2006). 2006.

Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

TY - GEN

T1 - An electrically tunable interdigitated cantilever array fabricated by nanoimprint lithography

AU - Luo, Gang

AU - Ghatnekar-Nilsson, Sara

AU - Maximov, Ivan

AU - Graczyk, Mariusz

AU - Carlberg, Patrick

AU - Adolph, David

AU - Hessman, Dan

AU - Zhu, T

AU - Liu, Z F

AU - Xu, Hongqi

AU - Montelius, Lars

PY - 2006

Y1 - 2006

M3 - Paper in conference proceeding

BT - Book of abstracts: Intl Conf on Nanoimprint and Nanoprint Technology, San Fransisco, Ca, USA (2006)

T2 - Intl Conf on Nanoimprint and Nanoprint Technology, 2006

Y2 - 15 November 2006 through 17 November 2011

ER -