Abstract
Intensities of infrared absorption due to asymmetric stretching vibrations of interstitial oxygen atoms in Ge crystals enriched with O-16 and O-18 isotopes have been compared with oxygen concentrations determined by means of secondary ion mass spectrometry (SIMS). For Ge samples with oxygen content less than 510(17) cm(-3) a good correlation has been found between the values of oxygen concentration and values of absorption coefficient in maximum of the absorption band at 855.6 cm(-1) with a proportionality coefficient C-O = 0.95 10(17) cm(-2). It is argued that kinetics of oxygen-related thermal double donor formation and oxygen loss upon heat-treatments of Ge crystals at 350 degrees C cannot be described properly with the application of calibration coefficient C-O 510(16) cm(-2), which is widely used for the determination of oxygen concentration in Ge crystals.
| Original language | English |
|---|---|
| Pages (from-to) | 735-740 |
| Journal | Solid State Phenomena |
| Volume | 108-109 |
| Publication status | Published - 2005 |
Subject classification (UKÄ)
- Condensed Matter Physics
Free keywords
- SIMS
- oxygen
- germanium
- infrared absorption