Abstract
A series of gas sensing layers based on indium oxide doped with gold were prepared by using the aerosol technology for deposition as the active contact layer in a metal oxide semiconductor capacitive device. The interaction between the measured species and the insulator surface was quantified as the voltage changes at a constant capacitance of the device. The sensor properties were investigated in the presence of H2, CO, NH3, NO, NO2 and C3H6 at temperatures between 100–400 °C. Significant differences in the morphology of the layer and its sensitivity were noted for different preparation methods and different gas environments.
Original language | English |
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Pages (from-to) | 105-109 |
Journal | Topics in Catalysis |
Volume | 45 |
Issue number | 1-4 |
DOIs | |
Publication status | Published - 2007 |
Subject classification (UKÄ)
- Production Engineering, Human Work Science and Ergonomics
Free keywords
- MIS gas sensors
- capacitive sensors
- indium oxide
- nanoparticles
- catalytic effect
- gold
- gas detectiuon
- NOx - CO - NH3 - C3H6.