Characterisation and comparison of a cMUT versus a piezoelectric transducer for air applications

Marcus Törndahl; Monica Almqvist; Lars Wallman; Hans W Persson; Kjell Lindström

doi:10.1109/ULTSYM.2002.1192469

Characterisation and comparison of a cMUT versus a piezoelectric transducer for air applications

Marcus Törndahl, Monica Almqvist, Lars Wallman, Hans W Persson, Kjell Lindström

Department of Biomedical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

Abstract

The main objectives with this investigation are firstly to compare important parameters of a capacitive micromachined ultrasonic transducer (cMUT) for air applications with a corresponding piezoelectric ultrasonic transducer. Secondly, to characterise the cMUT's radiation field using light diffraction tomography. The cMUTs consist of a silicon backplate with small pyramid-shaped cavities and a metallised polymeric membrane. The piezoelectric transducers are nonfocused with a resonance frequency of 450 kHz. Time waveforms, FFT-spectra, S/N-ratio, linearity plots and distance working range are presented for different kinds of combinations of cavity size, membrane thickness and bias voltage. Pressure maps from light diffraction tomography measurements are also presented. The principal conclusions are that the cMUTs have comparable linearity and sensitivity but exhibit superior bandwidth to the compared piezoelectric transducers

Original language	English
Title of host publication	2002 IEEE Ultrasonics Symposium. Proceedings (Cat. No.02CH37388)
Publisher	IEEE - Institute of Electrical and Electronics Engineers Inc.
Pages	1023-1026
ISBN (Print)	0-7803-7582-3
DOIs	https://doi.org/10.1109/ULTSYM.2002.1192469
Publication status	Published - 2002
Event	IEEE Ultrasonics Symposium, 2002 - Munich, Germany Duration: 2002 Oct 8 → 2002 Oct 11

Conference

Conference	IEEE Ultrasonics Symposium, 2002
Country/Territory	Germany
City	Munich
Period	2002/10/08 → 2002/10/11

Subject classification (UKÄ)

Medical Engineering

Free keywords

membrane thickness
distance working range
linearity plots
SNR
S/N ratio
FFT spectra
metallized polymeric membrane
pyramid-shaped cavities
Si backplate
light diffraction tomography
transducer radiation field
capacitive micromachined US transducer
air applications
piezoelectric US transducer
ultrasonic transducer comparison
cavity size
pressure maps
bias voltage
bandwidth
450 kHz
Si

Access to Document

10.1109/ULTSYM.2002.1192469

Cite this

Törndahl, M., Almqvist, M., Wallman, L., Persson, H. W., & Lindström, K. (2002). Characterisation and comparison of a cMUT versus a piezoelectric transducer for air applications. In 2002 IEEE Ultrasonics Symposium. Proceedings (Cat. No.02CH37388) (pp. 1023-1026). IEEE - Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ULTSYM.2002.1192469

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title = "Characterisation and comparison of a cMUT versus a piezoelectric transducer for air applications",

abstract = "The main objectives with this investigation are firstly to compare important parameters of a capacitive micromachined ultrasonic transducer (cMUT) for air applications with a corresponding piezoelectric ultrasonic transducer. Secondly, to characterise the cMUT's radiation field using light diffraction tomography. The cMUTs consist of a silicon backplate with small pyramid-shaped cavities and a metallised polymeric membrane. The piezoelectric transducers are nonfocused with a resonance frequency of 450 kHz. Time waveforms, FFT-spectra, S/N-ratio, linearity plots and distance working range are presented for different kinds of combinations of cavity size, membrane thickness and bias voltage. Pressure maps from light diffraction tomography measurements are also presented. The principal conclusions are that the cMUTs have comparable linearity and sensitivity but exhibit superior bandwidth to the compared piezoelectric transducers",

keywords = "membrane thickness, distance working range, linearity plots, SNR, S/N ratio, FFT spectra, metallized polymeric membrane, pyramid-shaped cavities, Si backplate, light diffraction tomography, transducer radiation field, capacitive micromachined US transducer, air applications, piezoelectric US transducer, ultrasonic transducer comparison, cavity size, pressure maps, bias voltage, bandwidth, 450 kHz, Si",

author = "Marcus T{\"o}rndahl and Monica Almqvist and Lars Wallman and Persson, {Hans W} and Kjell Lindstr{\"o}m",

year = "2002",

doi = "10.1109/ULTSYM.2002.1192469",

language = "English",

isbn = "0-7803-7582-3",

pages = "1023--1026",

booktitle = "2002 IEEE Ultrasonics Symposium. Proceedings (Cat. No.02CH37388)",

publisher = "IEEE - Institute of Electrical and Electronics Engineers Inc.",

address = "United States",

note = "IEEE Ultrasonics Symposium, 2002 ; Conference date: 08-10-2002 Through 11-10-2002",

}

Törndahl, M, Almqvist, M , Wallman, L , Persson, HW & Lindström, K 2002, Characterisation and comparison of a cMUT versus a piezoelectric transducer for air applications. in 2002 IEEE Ultrasonics Symposium. Proceedings (Cat. No.02CH37388). IEEE - Institute of Electrical and Electronics Engineers Inc., pp. 1023-1026, IEEE Ultrasonics Symposium, 2002, Munich, Germany, 2002/10/08. https://doi.org/10.1109/ULTSYM.2002.1192469

Characterisation and comparison of a cMUT versus a piezoelectric transducer for air applications. / Törndahl, Marcus; Almqvist, Monica ; Wallman, Lars et al.
2002 IEEE Ultrasonics Symposium. Proceedings (Cat. No.02CH37388). IEEE - Institute of Electrical and Electronics Engineers Inc., 2002. p. 1023-1026.

Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

TY - GEN

T1 - Characterisation and comparison of a cMUT versus a piezoelectric transducer for air applications

AU - Törndahl, Marcus

AU - Almqvist, Monica

AU - Wallman, Lars

AU - Persson, Hans W

AU - Lindström, Kjell

PY - 2002

Y1 - 2002

N2 - The main objectives with this investigation are firstly to compare important parameters of a capacitive micromachined ultrasonic transducer (cMUT) for air applications with a corresponding piezoelectric ultrasonic transducer. Secondly, to characterise the cMUT's radiation field using light diffraction tomography. The cMUTs consist of a silicon backplate with small pyramid-shaped cavities and a metallised polymeric membrane. The piezoelectric transducers are nonfocused with a resonance frequency of 450 kHz. Time waveforms, FFT-spectra, S/N-ratio, linearity plots and distance working range are presented for different kinds of combinations of cavity size, membrane thickness and bias voltage. Pressure maps from light diffraction tomography measurements are also presented. The principal conclusions are that the cMUTs have comparable linearity and sensitivity but exhibit superior bandwidth to the compared piezoelectric transducers

AB - The main objectives with this investigation are firstly to compare important parameters of a capacitive micromachined ultrasonic transducer (cMUT) for air applications with a corresponding piezoelectric ultrasonic transducer. Secondly, to characterise the cMUT's radiation field using light diffraction tomography. The cMUTs consist of a silicon backplate with small pyramid-shaped cavities and a metallised polymeric membrane. The piezoelectric transducers are nonfocused with a resonance frequency of 450 kHz. Time waveforms, FFT-spectra, S/N-ratio, linearity plots and distance working range are presented for different kinds of combinations of cavity size, membrane thickness and bias voltage. Pressure maps from light diffraction tomography measurements are also presented. The principal conclusions are that the cMUTs have comparable linearity and sensitivity but exhibit superior bandwidth to the compared piezoelectric transducers

KW - membrane thickness

KW - distance working range

KW - linearity plots

KW - SNR

KW - S/N ratio

KW - FFT spectra

KW - metallized polymeric membrane

KW - pyramid-shaped cavities

KW - Si backplate

KW - light diffraction tomography

KW - transducer radiation field

KW - capacitive micromachined US transducer

KW - air applications

KW - piezoelectric US transducer

KW - ultrasonic transducer comparison

KW - cavity size

KW - pressure maps

KW - bias voltage

KW - bandwidth

KW - 450 kHz

KW - Si

U2 - 10.1109/ULTSYM.2002.1192469

DO - 10.1109/ULTSYM.2002.1192469

M3 - Paper in conference proceeding

SN - 0-7803-7582-3

SP - 1023

EP - 1026

BT - 2002 IEEE Ultrasonics Symposium. Proceedings (Cat. No.02CH37388)

PB - IEEE - Institute of Electrical and Electronics Engineers Inc.

T2 - IEEE Ultrasonics Symposium, 2002

Y2 - 8 October 2002 through 11 October 2002

ER -

Characterisation and comparison of a cMUT versus a piezoelectric transducer for air applications

Abstract

Conference

Subject classification (UKÄ)

Free keywords

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