Characterisation of SU-8 as a platform for cantilever sensors

Maria Tenje, M. Calleja, A. Boisen

Research output: Contribution to conference › Paper, not in proceeding › peer-review

Original languageEnglish
Pages76-77
Publication statusPublished - 2006
Externally publishedYes
Event1st International workshop on nanomechanical sensors - Copenhagen, Denmark
Duration: 2006 May 8 → 2006 May 12

Conference

Conference1st International workshop on nanomechanical sensors
Country/TerritoryDenmark
CityCopenhagen
Period2006/05/08 → 2006/05/12

Subject classification (UKÄ)

  • Medical Engineering

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