Electron-beam mixing of W1 - xSix Si multilayers

I Vavra; LR Wallenberg; VA Kudryashov

doi:10.1016/0042-207X(95)00107-7

Electron-beam mixing of W1 - xSix Si multilayers

I Vavra, LR Wallenberg, VA Kudryashov

Centre for Analysis and Synthesis

Research output: Contribution to journal › Article › peer-review

Abstract

The high energy electron beam was used for the local amorphisation of metallic multilayer. The observed effect is proposed for the application in nanometer-scale technology.

Original language	English
Pages (from-to)	1063-1064
Number of pages	2
Journal	Vacuum
Volume	46
Issue number	8-10
DOIs	https://doi.org/10.1016/0042-207X(95)00107-7
Publication status	Published - 1995 Aug 1

Subject classification (UKÄ)

Condensed Matter Physics (including Material Physics, Nano Physics)

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10.1016/0042-207X(95)00107-7

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title = "Electron-beam mixing of W1 - xSix Si multilayers",

abstract = "The high energy electron beam was used for the local amorphisation of metallic multilayer. The observed effect is proposed for the application in nanometer-scale technology. ",

author = "I Vavra and LR Wallenberg and VA Kudryashov",

year = "1995",

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doi = "10.1016/0042-207X(95)00107-7",

language = "English",

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journal = "Vacuum",

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T1 - Electron-beam mixing of W1 - xSix Si multilayers

AU - Vavra, I

AU - Wallenberg, LR

AU - Kudryashov, VA

PY - 1995/8/1

Y1 - 1995/8/1

N2 - The high energy electron beam was used for the local amorphisation of metallic multilayer. The observed effect is proposed for the application in nanometer-scale technology.

AB - The high energy electron beam was used for the local amorphisation of metallic multilayer. The observed effect is proposed for the application in nanometer-scale technology.

UR - https://www.scopus.com/pages/publications/0029358019

U2 - 10.1016/0042-207X(95)00107-7

DO - 10.1016/0042-207X(95)00107-7

M3 - Article

SN - 0042-207X

VL - 46

SP - 1063

EP - 1064

JO - Vacuum

JF - Vacuum

IS - 8-10

ER -

Electron-beam mixing of W1 - xSix Si multilayers

Abstract

Subject classification (UKÄ)

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