@inproceedings{1a998dd4156945588a6a7b6c954b0b93,
title = "EXAFS measurements of metal-decorated nanocavities in Si",
abstract = "This contribution presents a sample preparation methodology to enable the identification, with synchrotron radiation-based analytical techniques, of the gettering sites of metallic impurities on the internal walls of implantation-induced nanocavities in Si substrates. Preliminary results for the Cu-Si and Cu-Cu bond lengths on the internal surface of the nanocavities are reported. (C) 2002 Elsevier Science B.V. All rights reserved.",
keywords = "voids, gettering, silicon, EXAFS, cavities",
author = "GD Azevedo and MC Ridgway and J Betlehem and KM Yu and Chris Glover and GJ Foran",
year = "2003",
doi = "10.1016/S0168-583X(02)01430-1",
language = "English",
volume = "199",
publisher = "Elsevier",
pages = "179--184",
booktitle = "Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms",
address = "United States",
note = "3rd International Conference on Synchrotron Radiation in Materials Science ; Conference date: 21-01-2002 Through 24-01-2002",
}