Fabrication and characterization of a nanosensor for admittance spectroscopy of biomolecules

Lars Montelius, Jonas O. Tegenfeldt, Torbjörn G.I. Ling

Research output: Contribution to journalArticlepeer-review

Abstract

We have fabricated nanometer-sized interdigitated electrode patterns using electron beam lithography and liftoff techniques. The aim of the investigation was to find out whether the dimensions (i.e., the electrode separations) of the pattern would affect the admittance signal of the biomolecules in between the electrodes. Since the admittance signal scales with the geometrical factor A/d, where A is the electrode area and d is the separation, we chose to keep A/d constant when changing the electrode separation in order to eliminate this trivial effect on the admittance signal. An interdigitated electrode structure having an interelectrode spacing in the nanometer regime makes it possible to reach high nonstationary as well as stationary electric field strengths while having a low applied voltage level. Hence, electrode reactions will be as small as possible, while a high signal to noise ratio is obtained. We have been able to experimentally study the response of the impedance behavior to high electric fields exhibiting either a positive or a negative shift of the permittivity as a function of the field being a high alternating-current or a direct-current field, respectively.

Original languageEnglish
Pages (from-to)1755-1760
Number of pages6
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume13
Issue number3
DOIs
Publication statusPublished - 1995 Jan 1

Subject classification (UKÄ)

  • Materials Chemistry
  • Condensed Matter Physics

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