Fabrication of cantilever based mass sensors inteagrated with CMOS using direct write laser lithography on resist

E Forsén; S G Nilsson; Patrick Carlberg; G Abadal; F Pérez-Murano; J Esteve; J Montserrat; E Figueras; F Campabadal; J Verd; Lars Montelius; N Barniol; A Boisen

Fabrication of cantilever based mass sensors inteagrated with CMOS using direct write laser lithography on resist

E Forsén, S G Nilsson, Patrick Carlberg, G Abadal, F Pérez-Murano, J Esteve, J Montserrat, E Figueras, F Campabadal, J Verd, Lars Montelius, N Barniol, A Boisen

Solid State Physics

Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

Original language	English
Title of host publication	Nanotechnol 15, S628-S633 (2004)
Publication status	Published - 2004
Event	Nanoscale Dev and System Integr Conf, Miami, Fl, USA (2004) - Duration: 0001 Jan 2 → …

Conference

Conference	Nanoscale Dev and System Integr Conf, Miami, Fl, USA (2004)
Period	0001/01/02 → …

Subject classification (UKÄ)

Condensed Matter Physics (including Material Physics, Nano Physics)

Cite this

@inproceedings{af86d2f51761432f893d58a4f5356797,

title = "Fabrication of cantilever based mass sensors inteagrated with CMOS using direct write laser lithography on resist",

author = "E Fors{\'e}n and Nilsson, {S G} and Patrick Carlberg and G Abadal and F P{\'e}rez-Murano and J Esteve and J Montserrat and E Figueras and F Campabadal and J Verd and Lars Montelius and N Barniol and A Boisen",

year = "2004",

language = "English",

booktitle = "Nanotechnol 15, S628-S633 (2004)",

note = "Nanoscale Dev and System Integr Conf, Miami, Fl, USA (2004) ; Conference date: 02-01-0001",

}

Forsén, E, Nilsson, SG, Carlberg, P, Abadal, G, Pérez-Murano, F, Esteve, J, Montserrat, J, Figueras, E, Campabadal, F, Verd, J, Montelius, L, Barniol, N & Boisen, A 2004, Fabrication of cantilever based mass sensors inteagrated with CMOS using direct write laser lithography on resist. in Nanotechnol 15, S628-S633 (2004). Nanoscale Dev and System Integr Conf, Miami, Fl, USA (2004), 0001/01/02.

TY - GEN

T1 - Fabrication of cantilever based mass sensors inteagrated with CMOS using direct write laser lithography on resist

AU - Forsén, E

AU - Nilsson, S G

AU - Carlberg, Patrick

AU - Abadal, G

AU - Pérez-Murano, F

AU - Esteve, J

AU - Montserrat, J

AU - Figueras, E

AU - Campabadal, F

AU - Verd, J

AU - Montelius, Lars

AU - Barniol, N

AU - Boisen, A

PY - 2004

Y1 - 2004

M3 - Paper in conference proceeding

BT - Nanotechnol 15, S628-S633 (2004)

T2 - Nanoscale Dev and System Integr Conf, Miami, Fl, USA (2004)

Y2 - 2 January 0001

ER -