Fabrication of micro-mechanical sensors with the polymer SU-8

S. Keller; Maria Tenje; N. Noeth; S. Dohn; G. Blagoi; D. Haefliger; A. Boisen

Fabrication of micro-mechanical sensors with the polymer SU-8

S. Keller, Maria Tenje, N. Noeth, S. Dohn, G. Blagoi, D. Haefliger, A. Boisen

External Organization - Unknown

Research output: Contribution to conference › Paper, not in proceeding › peer-review

Abstract

In this paper, we present the design and fabrication of biosensors based on SU-8 cantilevers with a thickness ≤ 5μm. The processing of the polymer was optimized to reduce initial bending of the devices which is essential for optical read-out of the cantilever deflection. Solvent absorption in the SU-8 had to be minimized to reduce drift of the cantilever bending during measurements in liquid. The shelf-life of the sensors was improved to enable storage for several months. Further, we introduced methods for process integrated metallization, backside passivation and surface functionalization allowing the fabrication of a variety of cantilever-based sensors.

Original language	English
Publication status	Published - 2009
Externally published	Yes
Event	Eurosensors XXIII - Lausanne, Switzerland Duration: 2009 Sept 6 → 2009 Sept 9

Conference

Conference	Eurosensors XXIII
Country/Territory	Switzerland
City	Lausanne
Period	2009/09/06 → 2009/09/09

Subject classification (UKÄ)

Medical Engineering

Cite this

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title = "Fabrication of micro-mechanical sensors with the polymer SU-8",

abstract = "In this paper, we present the design and fabrication of biosensors based on SU-8 cantilevers with a thickness ≤ 5μm. The processing of the polymer was optimized to reduce initial bending of the devices which is essential for optical read-out of the cantilever deflection. Solvent absorption in the SU-8 had to be minimized to reduce drift of the cantilever bending during measurements in liquid. The shelf-life of the sensors was improved to enable storage for several months. Further, we introduced methods for process integrated metallization, backside passivation and surface functionalization allowing the fabrication of a variety of cantilever-based sensors.",

author = "S. Keller and Maria Tenje and N. Noeth and S. Dohn and G. Blagoi and D. Haefliger and A. Boisen",

year = "2009",

language = "English",

note = "Eurosensors XXIII ; Conference date: 06-09-2009 Through 09-09-2009",

}

TY - CONF

T1 - Fabrication of micro-mechanical sensors with the polymer SU-8

AU - Keller, S.

AU - Tenje, Maria

AU - Noeth, N.

AU - Dohn, S.

AU - Blagoi, G.

AU - Haefliger, D.

AU - Boisen, A.

PY - 2009

Y1 - 2009

N2 - In this paper, we present the design and fabrication of biosensors based on SU-8 cantilevers with a thickness ≤ 5μm. The processing of the polymer was optimized to reduce initial bending of the devices which is essential for optical read-out of the cantilever deflection. Solvent absorption in the SU-8 had to be minimized to reduce drift of the cantilever bending during measurements in liquid. The shelf-life of the sensors was improved to enable storage for several months. Further, we introduced methods for process integrated metallization, backside passivation and surface functionalization allowing the fabrication of a variety of cantilever-based sensors.

AB - In this paper, we present the design and fabrication of biosensors based on SU-8 cantilevers with a thickness ≤ 5μm. The processing of the polymer was optimized to reduce initial bending of the devices which is essential for optical read-out of the cantilever deflection. Solvent absorption in the SU-8 had to be minimized to reduce drift of the cantilever bending during measurements in liquid. The shelf-life of the sensors was improved to enable storage for several months. Further, we introduced methods for process integrated metallization, backside passivation and surface functionalization allowing the fabrication of a variety of cantilever-based sensors.

M3 - Paper, not in proceeding

T2 - Eurosensors XXIII

Y2 - 6 September 2009 through 9 September 2009

ER -

Fabrication of micro-mechanical sensors with the polymer SU-8

Abstract

Conference

Subject classification (UKÄ)

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Cite this