Fully integrated nanoresonator system with attogram/Hz mass resolution

E Forsén, G Abadal, S G Nilsson, J Verd, R Sandberg, W Svendsen, J Teva, F Pérez-Murano, J Esteve, E Figueras, F Campabadal, Lars Montelius, N Barniol, A Boisen

Research output: Chapter in Book/Report/Conference proceedingPaper in conference proceedingResearchpeer-review

5 Citations (SciVal)
Original languageEnglish
Title of host publicationBook of extended abstracts: 18th IEEE Intl Conf on Microelectromech Systems, Miami, Fl, USA (2005)
Publication statusPublished - 2005
Event18th IEEE Intl Conf on Microelectromech Systems, Miami, Fl, USA (2005) -
Duration: 0001 Jan 2 → …

Conference

Conference18th IEEE Intl Conf on Microelectromech Systems, Miami, Fl, USA (2005)
Period0001/01/02 → …

Subject classification (UKÄ)

  • Condensed Matter Physics

Cite this