Abstract
The authors report the fabrication of gallium phosphide nanowire arrays that can be used for cellular force measurements. The nanowire positions are defined using electron beam lithography and the nanowires are grown using metal organic vapor phase epitaxy. By varying the nanowire diameter, length, and spacing from substrate to substrate, they can expect to probe cell forces over several orders of magnitude, depending on the chosen substrate. The small diameter of the nanowires allows them to densely pack the array and to achieve unprecedented spatial resolution for future cell force-array applications.
Original language | English |
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Pages (from-to) | 3092-3094 |
Journal | Journal of Vacuum Science and Technology B |
Volume | 27 |
Issue number | 6 |
DOIs | |
Publication status | Published - 2009 |
Subject classification (UKÄ)
- Zoology
- Condensed Matter Physics
Free keywords
- nanowires
- nanolithography
- nanofabrication
- nanobiotechnology
- MOCVD
- III-V semiconductors
- gallium compounds
- cellular biophysics
- electron beam lithography
- semiconductor growth
- vapour phase
- epitaxial growth