High performance slit-less spectrometer for soft x-ray emission spectroscopy

T. Tokushima; Yoshihisa Harada; H. Ohashi; Y. Senba; S. Shin

doi:10.1063/1.2204623

High performance slit-less spectrometer for soft x-ray emission spectroscopy

T. Tokushima, Yoshihisa Harada, H. Ohashi, Y. Senba, S. Shin

Research output: Contribution to journal › Article › peer-review

Abstract

We have designed and constructed a new flat-field-type slit-less soft x-ray emission spectrometer that enables high detection efficiency and high energy resolution in the energy range of 250-1000 eV. The energy resolution is optimized in the C 1s and O 1s regions, where the maximum energy resolution of 2500 (E/ΔE) is expected using a focused beam whose spot size is 5 μm full width at half maximum in the vertical direction. A distortion of the linear profile of the focused image on the charge-coupled device (CCD) detector is successfully removed by using a cylindrical grating. This enabled us to apply a super-resolution reconstruction technique to compensate for the lack of spatial resolution of the CCD detector.

Original language	English
Article number	063107
Journal	Review of Scientific Instruments
Volume	77
Issue number	6
DOIs	https://doi.org/10.1063/1.2204623
Publication status	Published - 2006
Externally published	Yes

Subject classification (UKÄ)

Subatomic Physics

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10.1063/1.2204623

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title = "High performance slit-less spectrometer for soft x-ray emission spectroscopy",

abstract = "We have designed and constructed a new flat-field-type slit-less soft x-ray emission spectrometer that enables high detection efficiency and high energy resolution in the energy range of 250-1000 eV. The energy resolution is optimized in the C 1s and O 1s regions, where the maximum energy resolution of 2500 (E/ΔE) is expected using a focused beam whose spot size is 5 μm full width at half maximum in the vertical direction. A distortion of the linear profile of the focused image on the charge-coupled device (CCD) detector is successfully removed by using a cylindrical grating. This enabled us to apply a super-resolution reconstruction technique to compensate for the lack of spatial resolution of the CCD detector.",

author = "T. Tokushima and Yoshihisa Harada and H. Ohashi and Y. Senba and S. Shin",

year = "2006",

doi = "10.1063/1.2204623",

language = "English",

volume = "77",

journal = "Review of Scientific Instruments",

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publisher = "American Institute of Physics (AIP)",

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AU - Tokushima, T.

AU - Harada, Yoshihisa

AU - Ohashi, H.

AU - Senba, Y.

AU - Shin, S.

PY - 2006

Y1 - 2006

N2 - We have designed and constructed a new flat-field-type slit-less soft x-ray emission spectrometer that enables high detection efficiency and high energy resolution in the energy range of 250-1000 eV. The energy resolution is optimized in the C 1s and O 1s regions, where the maximum energy resolution of 2500 (E/ΔE) is expected using a focused beam whose spot size is 5 μm full width at half maximum in the vertical direction. A distortion of the linear profile of the focused image on the charge-coupled device (CCD) detector is successfully removed by using a cylindrical grating. This enabled us to apply a super-resolution reconstruction technique to compensate for the lack of spatial resolution of the CCD detector.

AB - We have designed and constructed a new flat-field-type slit-less soft x-ray emission spectrometer that enables high detection efficiency and high energy resolution in the energy range of 250-1000 eV. The energy resolution is optimized in the C 1s and O 1s regions, where the maximum energy resolution of 2500 (E/ΔE) is expected using a focused beam whose spot size is 5 μm full width at half maximum in the vertical direction. A distortion of the linear profile of the focused image on the charge-coupled device (CCD) detector is successfully removed by using a cylindrical grating. This enabled us to apply a super-resolution reconstruction technique to compensate for the lack of spatial resolution of the CCD detector.

UR - https://www.scopus.com/pages/publications/33745713677

U2 - 10.1063/1.2204623

DO - 10.1063/1.2204623

M3 - Article

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SN - 0034-6748

VL - 77

JO - Review of Scientific Instruments

JF - Review of Scientific Instruments

IS - 6

M1 - 063107

ER -

High performance slit-less spectrometer for soft x-ray emission spectroscopy

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