High-rate dual-target dc magnetron sputtering of "blue" electromagnetic Mo oxide

Maryam Olsson; Lisen Kullman; Claes Göran Granqvist

doi:10.1016/S0927-0248(98)00033-6

High-rate dual-target dc magnetron sputtering of "blue" electromagnetic Mo oxide

Maryam Olsson, Lisen Kullman, Claes Göran Granqvist

External Organization - Unknown

Research output: Contribution to journal › Article › peer-review

Abstract

Mo oxide films were prepared by dual-target reactive DC magnetron sputtering under conditions leading to films that were blue in as-deposited state. The deposition rate for this “blue” Mo oxide was as high as 1.5 nm/s, to be compared to ∼0.85 and ∼0.1 nm/s for highly transparent Mo oxide films made with dual-target and single-target sputtering, respectively. Good electrochromic properties of the “blue” films evolved after ∼5 colour/bleach cycles in a Li+ conducting electrolyte.

Original language	English
Pages (from-to)	349-356
Journal	Solar Energy Materials and Solar Cells
Volume	53
Issue number	3-4
DOIs	https://doi.org/10.1016/S0927-0248(98)00033-6
Publication status	Published - 1998
Externally published	Yes

Subject classification (UKÄ)

Social Sciences Interdisciplinary
Other Engineering and Technologies not elsewhere specified

Free keywords

Thin films
Sputter deposition
Molybdenum oxide
Smart windows

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10.1016/S0927-0248(98)00033-6

Cite this

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title = "High-rate dual-target dc magnetron sputtering of {"}blue{"} electromagnetic Mo oxide",

abstract = "Mo oxide films were prepared by dual-target reactive DC magnetron sputtering under conditions leading to films that were blue in as-deposited state. The deposition rate for this “blue” Mo oxide was as high as 1.5 nm/s, to be compared to ∼0.85 and ∼0.1 nm/s for highly transparent Mo oxide films made with dual-target and single-target sputtering, respectively. Good electrochromic properties of the “blue” films evolved after ∼5 colour/bleach cycles in a Li+ conducting electrolyte.",

keywords = "Thin films, Sputter deposition, Molybdenum oxide, Smart windows",

author = "Maryam Olsson and Lisen Kullman and Granqvist, {Claes G{\"o}ran}",

year = "1998",

doi = "10.1016/S0927-0248(98)00033-6",

language = "English",

volume = "53",

pages = "349--356",

journal = "Solar Energy Materials and Solar Cells",

issn = "0927-0248",

publisher = "Elsevier",

number = "3-4",

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TY - JOUR

T1 - High-rate dual-target dc magnetron sputtering of "blue" electromagnetic Mo oxide

AU - Olsson, Maryam

AU - Kullman, Lisen

AU - Granqvist, Claes Göran

PY - 1998

Y1 - 1998

N2 - Mo oxide films were prepared by dual-target reactive DC magnetron sputtering under conditions leading to films that were blue in as-deposited state. The deposition rate for this “blue” Mo oxide was as high as 1.5 nm/s, to be compared to ∼0.85 and ∼0.1 nm/s for highly transparent Mo oxide films made with dual-target and single-target sputtering, respectively. Good electrochromic properties of the “blue” films evolved after ∼5 colour/bleach cycles in a Li+ conducting electrolyte.

AB - Mo oxide films were prepared by dual-target reactive DC magnetron sputtering under conditions leading to films that were blue in as-deposited state. The deposition rate for this “blue” Mo oxide was as high as 1.5 nm/s, to be compared to ∼0.85 and ∼0.1 nm/s for highly transparent Mo oxide films made with dual-target and single-target sputtering, respectively. Good electrochromic properties of the “blue” films evolved after ∼5 colour/bleach cycles in a Li+ conducting electrolyte.

KW - Thin films

KW - Sputter deposition

KW - Molybdenum oxide

KW - Smart windows

U2 - 10.1016/S0927-0248(98)00033-6

DO - 10.1016/S0927-0248(98)00033-6

M3 - Article

SN - 0927-0248

VL - 53

SP - 349

EP - 356

JO - Solar Energy Materials and Solar Cells

JF - Solar Energy Materials and Solar Cells

IS - 3-4

ER -

High-rate dual-target dc magnetron sputtering of "blue" electromagnetic Mo oxide

Abstract

Subject classification (UKÄ)

Free keywords

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