High rate magnetron sputter deposition of thin Al oxide and Mo oxide films

Maryam Olsson

Research output: Thesis › Licentiate Thesis

Abstract

Abstract to be added
Original languageEnglish
QualificationLicentiate
Supervisors/Advisors
  • Granqvist, Claes Göran, Supervisor, External person
Publisher
Publication statusPublished - 1997
Externally publishedYes

Subject classification (UKÄ)

  • Other Engineering and Technologies
  • Other Social Sciences

Fingerprint

Dive into the research topics of 'High rate magnetron sputter deposition of thin Al oxide and Mo oxide films'. Together they form a unique fingerprint.
View full fingerprint

Cite this