Abstract
Abstract to be added
| Original language | English |
|---|---|
| Qualification | Licentiate |
| Supervisors/Advisors |
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| Publisher | |
| Publication status | Published - 1997 |
| Externally published | Yes |
Subject classification (UKÄ)
- Other Engineering and Technologies
- Other Social Sciences
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Dive into the research topics of 'High rate magnetron sputter deposition of thin Al oxide and Mo oxide films'. Together they form a unique fingerprint.Cite this
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