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Impact of in situ NH3 pre-treatment of LPCVD SiN passivation on GaN HEMT performance
Ding-Yuan Chen, Axel R Persson, Kai-Hsin Wen, Daniel Sommer, Jan Grünenpütt, Hervé Blanck, Mattias Thorsell, Olof Kordina, Vanya Darakchieva, Per O Å Persson, Jr-Tai Chen, Niklas Rorsman
Research output: Contribution to journal › Article › peer-review