Influence of ion implantation on the physical and mechanical properties of multifunctional coatings based on Ti-Si-N

A. Shypylenko; A. V. Pshyk; K. Medjanik; B. Peplinska; K. Oyoshid; S. Jurga; E. Coya

doi:10.1109/NAP.2016.7757251

Influence of ion implantation on the physical and mechanical properties of multifunctional coatings based on Ti-Si-N

A. Shypylenko, A. V. Pshyk, K. Medjanik, B. Peplinska, K. Oyoshid, S. Jurga, E. Coya

MAX IV Laboratory

Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

Abstract

Current paper presents the results of investigating of multifunctional Ti-Si-N coatings. Ti-Si-N coatings have been deposited using CAVD method with the aim of studying their chemical, physical, structural and mechanical properties. Coatings of Ti-Si-N were modified by high-intensity ion implantation using copper ions with dose D = 2 × 10¹⁷ ions/cm² and energy E = 60 keV. The results demonstrated that ion implantation has effect on grain size, hardness, and Young modulus of the Ti-Si-N coating.

Original language	English
Title of host publication	Proceedings of the 6th International Conference Nanomaterials: Applications and Properties, NAP 2016
Publisher	IEEE - Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9781509025138
DOIs	https://doi.org/10.1109/NAP.2016.7757251
Publication status	Published - 2016 Nov 28
Event	6th International Conference Nanomaterials: Applications and Properties, NAP 2016 - Lviv, Ukraine Duration: 2016 Sept 14 → 2016 Sept 19

Conference

Conference	6th International Conference Nanomaterials: Applications and Properties, NAP 2016
Country/Territory	Ukraine
City	Lviv
Period	2016/09/14 → 2016/09/19

Subject classification (UKÄ)

Nano-technology

Free keywords

CAVD
coatings
hardness
ion implantation
NEXAFS
TiSiN
young modulus

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10.1109/NAP.2016.7757251

Cite this

Shypylenko, A., Pshyk, A. V., Medjanik, K., Peplinska, B., Oyoshid, K., Jurga, S., & Coya, E. (2016). Influence of ion implantation on the physical and mechanical properties of multifunctional coatings based on Ti-Si-N. In Proceedings of the 6th International Conference Nanomaterials: Applications and Properties, NAP 2016 Article 7757251 IEEE - Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/NAP.2016.7757251

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title = "Influence of ion implantation on the physical and mechanical properties of multifunctional coatings based on Ti-Si-N",

abstract = "Current paper presents the results of investigating of multifunctional Ti-Si-N coatings. Ti-Si-N coatings have been deposited using CAVD method with the aim of studying their chemical, physical, structural and mechanical properties. Coatings of Ti-Si-N were modified by high-intensity ion implantation using copper ions with dose D = 2 × 1017 ions/cm2 and energy E = 60 keV. The results demonstrated that ion implantation has effect on grain size, hardness, and Young modulus of the Ti-Si-N coating.",

keywords = "CAVD, coatings, hardness, ion implantation, NEXAFS, TiSiN, young modulus",

author = "A. Shypylenko and Pshyk, {A. V.} and K. Medjanik and B. Peplinska and K. Oyoshid and S. Jurga and E. Coya",

year = "2016",

month = nov,

day = "28",

doi = "10.1109/NAP.2016.7757251",

language = "English",

booktitle = "Proceedings of the 6th International Conference Nanomaterials: Applications and Properties, NAP 2016",

publisher = "IEEE - Institute of Electrical and Electronics Engineers Inc.",

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note = "6th International Conference Nanomaterials: Applications and Properties, NAP 2016 ; Conference date: 14-09-2016 Through 19-09-2016",

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Shypylenko, A, Pshyk, AV, Medjanik, K, Peplinska, B, Oyoshid, K, Jurga, S & Coya, E 2016, Influence of ion implantation on the physical and mechanical properties of multifunctional coatings based on Ti-Si-N. in Proceedings of the 6th International Conference Nanomaterials: Applications and Properties, NAP 2016., 7757251, IEEE - Institute of Electrical and Electronics Engineers Inc., 6th International Conference Nanomaterials: Applications and Properties, NAP 2016, Lviv, Ukraine, 2016/09/14. https://doi.org/10.1109/NAP.2016.7757251

Influence of ion implantation on the physical and mechanical properties of multifunctional coatings based on Ti-Si-N. / Shypylenko, A.; Pshyk, A. V.; Medjanik, K. et al.
Proceedings of the 6th International Conference Nanomaterials: Applications and Properties, NAP 2016. IEEE - Institute of Electrical and Electronics Engineers Inc., 2016. 7757251.

Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

TY - GEN

T1 - Influence of ion implantation on the physical and mechanical properties of multifunctional coatings based on Ti-Si-N

AU - Shypylenko, A.

AU - Pshyk, A. V.

AU - Medjanik, K.

AU - Peplinska, B.

AU - Oyoshid, K.

AU - Jurga, S.

AU - Coya, E.

PY - 2016/11/28

Y1 - 2016/11/28

N2 - Current paper presents the results of investigating of multifunctional Ti-Si-N coatings. Ti-Si-N coatings have been deposited using CAVD method with the aim of studying their chemical, physical, structural and mechanical properties. Coatings of Ti-Si-N were modified by high-intensity ion implantation using copper ions with dose D = 2 × 1017 ions/cm2 and energy E = 60 keV. The results demonstrated that ion implantation has effect on grain size, hardness, and Young modulus of the Ti-Si-N coating.

AB - Current paper presents the results of investigating of multifunctional Ti-Si-N coatings. Ti-Si-N coatings have been deposited using CAVD method with the aim of studying their chemical, physical, structural and mechanical properties. Coatings of Ti-Si-N were modified by high-intensity ion implantation using copper ions with dose D = 2 × 1017 ions/cm2 and energy E = 60 keV. The results demonstrated that ion implantation has effect on grain size, hardness, and Young modulus of the Ti-Si-N coating.

KW - CAVD

KW - coatings

KW - hardness

KW - ion implantation

KW - NEXAFS

KW - TiSiN

KW - young modulus

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U2 - 10.1109/NAP.2016.7757251

DO - 10.1109/NAP.2016.7757251

M3 - Paper in conference proceeding

AN - SCOPUS:85007044588

BT - Proceedings of the 6th International Conference Nanomaterials: Applications and Properties, NAP 2016

PB - IEEE - Institute of Electrical and Electronics Engineers Inc.

T2 - 6th International Conference Nanomaterials: Applications and Properties, NAP 2016

Y2 - 14 September 2016 through 19 September 2016

ER -

Shypylenko A, Pshyk AV, Medjanik K, Peplinska B, Oyoshid K, Jurga S et al. Influence of ion implantation on the physical and mechanical properties of multifunctional coatings based on Ti-Si-N. In Proceedings of the 6th International Conference Nanomaterials: Applications and Properties, NAP 2016. IEEE - Institute of Electrical and Electronics Engineers Inc. 2016. 7757251 doi: 10.1109/NAP.2016.7757251

Influence of ion implantation on the physical and mechanical properties of multifunctional coatings based on Ti-Si-N

Abstract

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Subject classification (UKÄ)

Free keywords

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