Ion-induced nanopatterns on semiconductor surfaces investigated by grazing incidence x-ray scattering techniques

Engineering

• Scattering 100%
• Ion Energy 100%
• Semiconductor Surface 100%
• Accuracy 50%
• Wavelength 50%
• Erosion 50%
• Temporal Evolution 50%
• Stabilization 50%
• Early Stage 50%
• Nanoscale 50%
• Situ Study 50%
• Situ Measurement 50%
• Subsurface 50%
• Thick Layer 50%

Physics

• Ion 100%
• Semiconductors 100%
• Grazing Incidence 100%
• Ion Beams 33%
• Utilization 33%
• Fluence 33%
• Born Approximation 33%

Material Science

• Surface 100%
• Semiconductor Material 100%
• Crystalline Material 66%
• Amorphous Material 66%
• Nanocrystalline Material 33%
• Surface Structure 33%