Microbiosensor based on an integrated thermopile

A microbiosensor based on an integrated thermopile was designed and fabricated on a quartz chip. The thermopile, which was manufactured by doping boron in polysilicon together with aluminium, provided a potential output of ca. 2 mV K. A silicone rubber membrane was used to form and seal the microchannel. The total column volume was 20 μl. Glucose oxidase and catalase were co-immobilized on spherical CPG beads (controlled pore glass) and in turn charged into the microchannel. Using 1 μl sample volumes, a linear range of 2 to 25 mM glucose was obtained using a flow rate of 105 μl min. The relative standard deviation for 100 glucose samples (10 mM) was 5%.