TY - JOUR
T1 - Molecular beam epitaxy of InAs nanowires in SiO2 nanotube templates
T2 - challenges and prospects for integration of III-Vs on Si
AU - Vukajlovic-Plestina, Jelena
AU - Dubrovskii, Vladimir G
AU - Tütüncuoǧlu, Gözde
AU - Potts, Heidi
AU - Ricca, Ruben
AU - Meyer, Frank
AU - Matteini, Federico
AU - Leran, Jean-Baptiste
AU - I Morral, Anna Fontcuberta
PY - 2016/11/11
Y1 - 2016/11/11
N2 - Guided growth of semiconductor nanowires in nanotube templates has been considered as a potential platform for reproducible integration of III-Vs on silicon or other mismatched substrates. Herein, we report on the challenges and prospects of molecular beam epitaxy of InAs nanowires in SiO2/Si nanotube templates. We show how and under which conditions the nanowire growth is initiated by In-assisted vapor-liquid-solid growth enabled by the local conditions inside the nanotube template. The conditions for high yield of vertical nanowires are investigated in terms of the nanotube depth, diameter and V/III flux ratios. We present a model that further substantiates our findings. This work opens new perspectives for monolithic integration of III-Vs on the silicon platform enabling new applications in the electronics, optoelectronics and energy harvesting arena.
AB - Guided growth of semiconductor nanowires in nanotube templates has been considered as a potential platform for reproducible integration of III-Vs on silicon or other mismatched substrates. Herein, we report on the challenges and prospects of molecular beam epitaxy of InAs nanowires in SiO2/Si nanotube templates. We show how and under which conditions the nanowire growth is initiated by In-assisted vapor-liquid-solid growth enabled by the local conditions inside the nanotube template. The conditions for high yield of vertical nanowires are investigated in terms of the nanotube depth, diameter and V/III flux ratios. We present a model that further substantiates our findings. This work opens new perspectives for monolithic integration of III-Vs on the silicon platform enabling new applications in the electronics, optoelectronics and energy harvesting arena.
U2 - 10.1088/0957-4484/27/45/455601
DO - 10.1088/0957-4484/27/45/455601
M3 - Article
C2 - 27698287
SN - 0957-4484
VL - 27
SP - 455601
JO - Nanotechnology
JF - Nanotechnology
IS - 45
ER -