Multi-beam X-ray ptychography using coded probes for rapid non-destructive high resolution imaging of extended samples

Mikhail Lyubomirskiy, Felix Wittwer, Maik Kahnt, Frieder Koch, Adam Kubec, Ken Vidar Falch, Jan Garrevoet, Martin Seyrich, Christian David, Christian G. Schroer

Research output: Contribution to journalArticlepeer-review

Abstract

Imaging large areas of a sample non-destructively and with high resolution is of great interest for both science and industry. For scanning coherent X-ray diffraction microscopy, i. e., ptychography, the achievable scan area at a given spatial resolution is limited by the coherent photon flux of modern X-ray sources. Multibeam X-ray ptychography can improve the scanning speed by scanning the sample with several parallel mutually incoherent beams, e. g., generated by illuminating multiple focusing optics in parallel by a partially coherent beam. The main difficulty with this scheme is the robust separation of the superimposed signals from the different beams, especially when the beams and the illuminated sample areas are quite similar. We overcome this difficulty by encoding each of the probing beams with its own X-ray phase plate. This helps the algorithm to robustly reconstruct the multibeam data. We compare the coded multibeam scans to uncoded multibeam and single beam scans, demonstrating the enhanced performance on a microchip sample with regular and repeating structures.

Original languageEnglish
Article number6203
JournalScientific Reports
Volume12
Issue number1
DOIs
Publication statusPublished - 2022 Dec

Subject classification (UKÄ)

  • Accelerator Physics and Instrumentation
  • Atom and Molecular Physics and Optics

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