Nanoelectrochemical transducers for (bio-) chemical sensor applications fabricated by nanoimprint lithography

Marc Beck; F Persson; Patrick Carlberg; Mariusz Graczyk; Ivan Maximov; TGI Ling; Lars Montelius

doi:10.1016/j.mee.2004.03.061

Nanoelectrochemical transducers for (bio-) chemical sensor applications fabricated by nanoimprint lithography

Marc Beck, F Persson, Patrick Carlberg, Mariusz Graczyk, Ivan Maximov, TGI Ling, Lars Montelius

Solid State Physics

Research output: Contribution to journal › Article › peer-review

Abstract

Nanometer-structured transducers for commercial use in pharmaceutical, medical or (bio-) chemical analysis have so far been hardly accessible since they could not be produced by parallel lithography techniques at reasonable costs. We introduce here a method on. how to fabricate nanometer-structured interdigitated array electrodes including interconnections and bond pads in the micrometer range in a single imprint step on 2-in. wafer scale. The method enables the mass production of those devices at lowest cost opening a new field for the commercial use of nanometer-structured sensor systems.

Original language	English
Pages (from-to)	837-842
Journal	Microelectronic Engineering
Volume	73-74
DOIs	https://doi.org/10.1016/j.mee.2004.03.061
Publication status	Published - 2004

Subject classification (UKÄ)

Condensed Matter Physics (including Material Physics, Nano Physics)

Free keywords

transducer
nanoimprint lithography
sensor
redox cycling
interdigitated array electrode

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10.1016/j.mee.2004.03.061

Cite this

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title = "Nanoelectrochemical transducers for (bio-) chemical sensor applications fabricated by nanoimprint lithography",

abstract = "Nanometer-structured transducers for commercial use in pharmaceutical, medical or (bio-) chemical analysis have so far been hardly accessible since they could not be produced by parallel lithography techniques at reasonable costs. We introduce here a method on. how to fabricate nanometer-structured interdigitated array electrodes including interconnections and bond pads in the micrometer range in a single imprint step on 2-in. wafer scale. The method enables the mass production of those devices at lowest cost opening a new field for the commercial use of nanometer-structured sensor systems.",

keywords = "transducer, nanoimprint lithography, sensor, redox cycling, interdigitated array electrode",

author = "Marc Beck and F Persson and Patrick Carlberg and Mariusz Graczyk and Ivan Maximov and TGI Ling and Lars Montelius",

year = "2004",

doi = "10.1016/j.mee.2004.03.061",

language = "English",

volume = "73-74",

pages = "837--842",

journal = "Microelectronic Engineering",

issn = "1873-5568",

publisher = "Elsevier",

}

TY - JOUR

T1 - Nanoelectrochemical transducers for (bio-) chemical sensor applications fabricated by nanoimprint lithography

AU - Beck, Marc

AU - Persson, F

AU - Carlberg, Patrick

AU - Graczyk, Mariusz

AU - Maximov, Ivan

AU - Ling, TGI

AU - Montelius, Lars

PY - 2004

Y1 - 2004

N2 - Nanometer-structured transducers for commercial use in pharmaceutical, medical or (bio-) chemical analysis have so far been hardly accessible since they could not be produced by parallel lithography techniques at reasonable costs. We introduce here a method on. how to fabricate nanometer-structured interdigitated array electrodes including interconnections and bond pads in the micrometer range in a single imprint step on 2-in. wafer scale. The method enables the mass production of those devices at lowest cost opening a new field for the commercial use of nanometer-structured sensor systems.

AB - Nanometer-structured transducers for commercial use in pharmaceutical, medical or (bio-) chemical analysis have so far been hardly accessible since they could not be produced by parallel lithography techniques at reasonable costs. We introduce here a method on. how to fabricate nanometer-structured interdigitated array electrodes including interconnections and bond pads in the micrometer range in a single imprint step on 2-in. wafer scale. The method enables the mass production of those devices at lowest cost opening a new field for the commercial use of nanometer-structured sensor systems.

KW - transducer

KW - nanoimprint lithography

KW - sensor

KW - redox cycling

KW - interdigitated array electrode

U2 - 10.1016/j.mee.2004.03.061

DO - 10.1016/j.mee.2004.03.061

M3 - Article

SN - 1873-5568

VL - 73-74

SP - 837

EP - 842

JO - Microelectronic Engineering

JF - Microelectronic Engineering

ER -

Nanoelectrochemical transducers for (bio-) chemical sensor applications fabricated by nanoimprint lithography

Abstract

Subject classification (UKÄ)

Free keywords

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