Nanoimprint-based fabrication and characterization of interdigitated cantilevver array

Gang Luo, Sara Ghatnekar-Nilsson, Ivan Maximov, Mariusz Graczyk, Patrick Carlberg, David Adolph, Dan Hessman, T Zhu, Z Liu, Hongqi Xu, Lars Montelius

Research output: Chapter in Book/Report/Conference proceedingPaper in conference proceedingpeer-review

Original languageEnglish
Title of host publicationBook of abstracts: Intl Conf on Nanosci and Technol, Basel, Switzerland (2006)
Publication statusPublished - 2006
EventInternational Conference on Nanoscience and Technology, 2006 - Basel, Switzerland
Duration: 2006 Jul 302006 Aug 4


ConferenceInternational Conference on Nanoscience and Technology, 2006

Subject classification (UKÄ)

  • Condensed Matter Physics

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