Nanoimprint technology for fabrication of three-terminal ballistic junction devices in GaInAs/InP

Ivan Maximov, Patrick Carlberg, Ivan Shorubalko, Daniel Wallin, Eva-Lena Sarwe, Marc Beck, Mariusz Graczyk, Werner Seifert, Hongqi Xu, Lars Montelius, Lars Samuelson

Research output: Contribution to journalArticlepeer-review

2 Citations (SciVal)

Abstract

We present processing technology based on nanoimprint lithography (NIL) and wet etching for fabrication of GaInAs/InP three-terminal ballistic junction (TBJ) devices. To transfer sub-100 nm features into a high-mobility InP-based 2DEG material, we used SiO2/Si stamps made with electron beam lithography and reactive ion etching. After the NIL, the resist residues are removed in oxygen plasma followed by wet etching of GaInAs/InP to define the M-structures. Fabricated TBJ-devices are characterized using scanning electron microscopy and electron transport measurements. Highly non-linear electrical characteristics of the TBJ structures are demonstrated and compared with E-beam defined devices. (C) 2003 Elsevier Science B.V. All rights reserved.
Original languageEnglish
Pages (from-to)196-202
JournalMicroelectronic Engineering
Volume67-8
DOIs
Publication statusPublished - 2003

Subject classification (UKÄ)

  • Condensed Matter Physics

Keywords

  • nanoimprint lithography
  • GaInAs/InP
  • three-terminal ballistic junction

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