Nanoimprint technology for fabrication of tunable grating structures

Gang Luo, Ivan Maximov, Mariusz Graczyk, David Adolph, Patrick Carlberg, T Zhu, Z Liu, Hongqi Xu, Lars Montelius

Research output: Chapter in Book/Report/Conference proceedingPaper in conference proceedingpeer-review

Original languageEnglish
Title of host publicationBook of extended abstracts: 31st Intl Conf Micro- and Nano-Engineering, Vienna, Austria (2005)
Publication statusPublished - 2005
Event31st Intl Conf Micro- and Nano-Engineering, 2005 - Vienna, Austria
Duration: 2005 Sep 192005 Sep 22
Conference number: 31

Conference

Conference31st Intl Conf Micro- and Nano-Engineering, 2005
Country/TerritoryAustria
CityVienna
Period2005/09/192005/09/22

Subject classification (UKÄ)

  • Condensed Matter Physics

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