Nanoimprint technology for fabrication of tunable grating structures

Gang Luo, Ivan Maximov, Mariusz Graczyk, David Adolph, Patrick Carlberg, T Zhu, Z Liu, Hongqi Xu, Lars Montelius

Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

Original language	English
Title of host publication	Book of extended abstracts: 31st Intl Conf Micro- and Nano-Engineering, Vienna, Austria (2005)
Publication status	Published - 2005
Event	31st Intl Conf Micro- and Nano-Engineering, 2005 - Vienna, Austria Duration: 2005 Sept 19 → 2005 Sept 22 Conference number: 31

Conference	31st Intl Conf Micro- and Nano-Engineering, 2005
Country/Territory	Austria
City	Vienna
Period	2005/09/19 → 2005/09/22

Subject classification (UKÄ)

@inproceedings{fca28dbb964a47b5a549c638ae79f30f,

title = "Nanoimprint technology for fabrication of tunable grating structures",

author = "Gang Luo and Ivan Maximov and Mariusz Graczyk and David Adolph and Patrick Carlberg and T Zhu and Z Liu and Hongqi Xu and Lars Montelius",

year = "2005",

language = "English",

booktitle = "Book of extended abstracts: 31st Intl Conf Micro- and Nano-Engineering, Vienna, Austria (2005)",

note = "31st Intl Conf Micro- and Nano-Engineering, 2005 ; Conference date: 19-09-2005 Through 22-09-2005",

}

TY - GEN

T1 - Nanoimprint technology for fabrication of tunable grating structures

AU - Luo, Gang

AU - Maximov, Ivan

AU - Graczyk, Mariusz

AU - Adolph, David

AU - Carlberg, Patrick

AU - Zhu, T

AU - Liu, Z

AU - Xu, Hongqi

AU - Montelius, Lars

N1 - Conference code: 31

PY - 2005

Y1 - 2005

M3 - Paper in conference proceeding

BT - Book of extended abstracts: 31st Intl Conf Micro- and Nano-Engineering, Vienna, Austria (2005)

T2 - 31st Intl Conf Micro- and Nano-Engineering, 2005

Y2 - 19 September 2005 through 22 September 2005

ER -