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Negative UV–NIL (NUV–NIL) – A mix-and-match NIL and UV strategy for realisation of nano- and micrometre structures
Lars Henrik Skjolding, Genis Turon Teixidor, Jenny Emnéus, Lars Montelius
Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review
13
Citations
(SciVal)