Negative UV–NIL (NUV–NIL) – A mix-and-match NIL and UV strategy for realisation of nano- and micrometre structures

Lars Henrik Skjolding, Genis Turon Teixidor, Jenny Emnéus, Lars Montelius

Research output: Chapter in Book/Report/Conference proceedingPaper in conference proceedingpeer-review

13 Citations (SciVal)

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Physics & Astronomy