Planar refractive lenses made of SiC for high intensity nanofocusing

Mikhail Lyubomirskiy; Bart Schurink; Igor A. Makhotkin; Dennis Brueckner; Felix Wittwer; Maik Kahnt; Martin Seyrich; Frank Seiboth; Fred Bijkerk; Christian G. Schroer

doi:10.1364/OE.416223

Planar refractive lenses made of SiC for high intensity nanofocusing

Mikhail Lyubomirskiy, Bart Schurink, Igor A. Makhotkin, Dennis Brueckner, Felix Wittwer, Maik Kahnt, Martin Seyrich, Frank Seiboth, Fred Bijkerk, Christian G. Schroer

MAX IV Laboratory

Research output: Contribution to journal › Article › peer-review

Abstract

We report on the manufacturing and testing of the first nanofocusing refractive lenses made of single-crystal silicon carbide. We introduce the fabrication process based on lithography, followed by deep isotropic etching. The lenses were characterized at the energy of 12 keV at the beamline P06 of the synchrotron radiation source PETRA III. A focal spot of 186 nm x 275 nm has been achieved with a lens working distance of 29 mm.

Original language	English
Pages (from-to)	14025-14032
Number of pages	8
Journal	Optics Express
Volume	29
Issue number	9
DOIs	https://doi.org/10.1364/OE.416223
Publication status	Published - 2021 Apr 26

Subject classification (UKÄ)

Atom and Molecular Physics and Optics

Free keywords

Hard x rays
Planar lenses
Synchrotron radiation
X ray diffraction
X ray microscopy
X ray optics

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10.1364/OE.416223Licence: CC BY

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abstract = "We report on the manufacturing and testing of the first nanofocusing refractive lenses made of single-crystal silicon carbide. We introduce the fabrication process based on lithography, followed by deep isotropic etching. The lenses were characterized at the energy of 12 keV at the beamline P06 of the synchrotron radiation source PETRA III. A focal spot of 186 nm x 275 nm has been achieved with a lens working distance of 29 mm.",

keywords = "Hard x rays, Planar lenses, Synchrotron radiation, X ray diffraction, X ray microscopy, X ray optics",

author = "Mikhail Lyubomirskiy and Bart Schurink and Makhotkin, {Igor A.} and Dennis Brueckner and Felix Wittwer and Maik Kahnt and Martin Seyrich and Frank Seiboth and Fred Bijkerk and Schroer, {Christian G.}",

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AU - Lyubomirskiy, Mikhail

AU - Schurink, Bart

AU - Makhotkin, Igor A.

AU - Brueckner, Dennis

AU - Wittwer, Felix

AU - Kahnt, Maik

AU - Seyrich, Martin

AU - Seiboth, Frank

AU - Bijkerk, Fred

AU - Schroer, Christian G.

PY - 2021/4/26

Y1 - 2021/4/26

N2 - We report on the manufacturing and testing of the first nanofocusing refractive lenses made of single-crystal silicon carbide. We introduce the fabrication process based on lithography, followed by deep isotropic etching. The lenses were characterized at the energy of 12 keV at the beamline P06 of the synchrotron radiation source PETRA III. A focal spot of 186 nm x 275 nm has been achieved with a lens working distance of 29 mm.

AB - We report on the manufacturing and testing of the first nanofocusing refractive lenses made of single-crystal silicon carbide. We introduce the fabrication process based on lithography, followed by deep isotropic etching. The lenses were characterized at the energy of 12 keV at the beamline P06 of the synchrotron radiation source PETRA III. A focal spot of 186 nm x 275 nm has been achieved with a lens working distance of 29 mm.

KW - Hard x rays

KW - Planar lenses

KW - Synchrotron radiation

KW - X ray diffraction

KW - X ray microscopy

KW - X ray optics

U2 - 10.1364/OE.416223

DO - 10.1364/OE.416223

M3 - Article

C2 - 33985128

SN - 1094-4087

VL - 29

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EP - 14032

JO - Optics Express

JF - Optics Express

IS - 9

ER -

Planar refractive lenses made of SiC for high intensity nanofocusing

Abstract

Subject classification (UKÄ)

Free keywords

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