PtyNAMi: Ptychographic nano-analytical microscope at PETRA III - Interferometrically tracking positions for 3D x-ray scanning microscopy using a ball-lens retroreflector

Christian G. Schroer; Martin Seyrich; Maik Kahnt; Stephan Botta; Ralph Döhrmann; Gerald Falkenberg; Jan Garrevoet; Mikhail Lyubomirskiy; Maria Scholz; Andreas Schropp; Felix Wittwer

doi:10.1117/12.2273710

PtyNAMi: Ptychographic nano-analytical microscope at PETRA III - Interferometrically tracking positions for 3D x-ray scanning microscopy using a ball-lens retroreflector

Christian G. Schroer, Martin Seyrich, Maik Kahnt, Stephan Botta, Ralph Döhrmann, Gerald Falkenberg, Jan Garrevoet, Mikhail Lyubomirskiy, Maria Scholz, Andreas Schropp, Felix Wittwer

Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

Abstract

In recent years, ptychography has revolutionized x-ray microscopy in that it is able to overcome the diffraction limit of x-ray optics, pushing the spatial resolution limit down to a few nanometers. However, due to the weak interaction of x rays with matter, the detection of small features inside a sample requires a high coherent fluence on the sample, a high degree of mechanical stability, and a low background signal from the x-ray microscope. The x-ray scanning microscope PtyNAMi at PETRA III is designed for high-spatial-resolution 3D imaging with high sensitivity. The design concept is presented with a special focus on real-time metrology of the sample position during tomographic scanning microscopy.

Original language	English
Title of host publication	X-Ray Nanoimaging
Subtitle of host publication	Instruments and Methods III
Editors	Andrea Somogyi, Barry Lai
Publisher	SPIE
Volume	10389
ISBN (Electronic)	9781510612358
DOIs	https://doi.org/10.1117/12.2273710
Publication status	Published - 2017 Jan 1
Externally published	Yes
Event	X-Ray Nanoimaging: Instruments and Methods III 2017 - San Diego, United States Duration: 2017 Aug 7 → 2017 Aug 8

Conference

Conference	X-Ray Nanoimaging: Instruments and Methods III 2017
Country/Territory	United States
City	San Diego
Period	2017/08/07 → 2017/08/08

Keywords

Interferometry
Nanopositioning
Ptychography
X-ray scanning microscopy

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10.1117/12.2273710

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Schroer, C. G., Seyrich, M., Kahnt, M., Botta, S., Döhrmann, R., Falkenberg, G., Garrevoet, J., Lyubomirskiy, M., Scholz, M., Schropp, A., & Wittwer, F. (2017). PtyNAMi: Ptychographic nano-analytical microscope at PETRA III - Interferometrically tracking positions for 3D x-ray scanning microscopy using a ball-lens retroreflector. In A. Somogyi, & B. Lai (Eds.), X-Ray Nanoimaging: Instruments and Methods III (Vol. 10389). [103890E] SPIE. https://doi.org/10.1117/12.2273710

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title = "PtyNAMi: Ptychographic nano-analytical microscope at PETRA III - Interferometrically tracking positions for 3D x-ray scanning microscopy using a ball-lens retroreflector",

abstract = "In recent years, ptychography has revolutionized x-ray microscopy in that it is able to overcome the diffraction limit of x-ray optics, pushing the spatial resolution limit down to a few nanometers. However, due to the weak interaction of x rays with matter, the detection of small features inside a sample requires a high coherent fluence on the sample, a high degree of mechanical stability, and a low background signal from the x-ray microscope. The x-ray scanning microscope PtyNAMi at PETRA III is designed for high-spatial-resolution 3D imaging with high sensitivity. The design concept is presented with a special focus on real-time metrology of the sample position during tomographic scanning microscopy.",

keywords = "Interferometry, Nanopositioning, Ptychography, X-ray scanning microscopy",

author = "Schroer, {Christian G.} and Martin Seyrich and Maik Kahnt and Stephan Botta and Ralph D{\"o}hrmann and Gerald Falkenberg and Jan Garrevoet and Mikhail Lyubomirskiy and Maria Scholz and Andreas Schropp and Felix Wittwer",

year = "2017",

month = jan,

day = "1",

doi = "10.1117/12.2273710",

language = "English",

volume = "10389",

editor = "Andrea Somogyi and Barry Lai",

booktitle = "X-Ray Nanoimaging",

publisher = "SPIE",

address = "United States",

note = "X-Ray Nanoimaging: Instruments and Methods III 2017 ; Conference date: 07-08-2017 Through 08-08-2017",

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Schroer, CG, Seyrich, M, Kahnt, M, Botta, S, Döhrmann, R, Falkenberg, G, Garrevoet, J, Lyubomirskiy, M, Scholz, M, Schropp, A & Wittwer, F 2017, PtyNAMi: Ptychographic nano-analytical microscope at PETRA III - Interferometrically tracking positions for 3D x-ray scanning microscopy using a ball-lens retroreflector. in A Somogyi & B Lai (eds), X-Ray Nanoimaging: Instruments and Methods III. vol. 10389, 103890E, SPIE, X-Ray Nanoimaging: Instruments and Methods III 2017, San Diego, United States, 2017/08/07. https://doi.org/10.1117/12.2273710

PtyNAMi : Ptychographic nano-analytical microscope at PETRA III - Interferometrically tracking positions for 3D x-ray scanning microscopy using a ball-lens retroreflector. / Schroer, Christian G.; Seyrich, Martin; Kahnt, Maik et al.

X-Ray Nanoimaging: Instruments and Methods III. ed. / Andrea Somogyi; Barry Lai. Vol. 10389 SPIE, 2017. 103890E.

Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

TY - GEN

T1 - PtyNAMi

T2 - X-Ray Nanoimaging: Instruments and Methods III 2017

AU - Schroer, Christian G.

AU - Seyrich, Martin

AU - Kahnt, Maik

AU - Botta, Stephan

AU - Döhrmann, Ralph

AU - Falkenberg, Gerald

AU - Garrevoet, Jan

AU - Lyubomirskiy, Mikhail

AU - Scholz, Maria

AU - Schropp, Andreas

AU - Wittwer, Felix

PY - 2017/1/1

Y1 - 2017/1/1

N2 - In recent years, ptychography has revolutionized x-ray microscopy in that it is able to overcome the diffraction limit of x-ray optics, pushing the spatial resolution limit down to a few nanometers. However, due to the weak interaction of x rays with matter, the detection of small features inside a sample requires a high coherent fluence on the sample, a high degree of mechanical stability, and a low background signal from the x-ray microscope. The x-ray scanning microscope PtyNAMi at PETRA III is designed for high-spatial-resolution 3D imaging with high sensitivity. The design concept is presented with a special focus on real-time metrology of the sample position during tomographic scanning microscopy.

AB - In recent years, ptychography has revolutionized x-ray microscopy in that it is able to overcome the diffraction limit of x-ray optics, pushing the spatial resolution limit down to a few nanometers. However, due to the weak interaction of x rays with matter, the detection of small features inside a sample requires a high coherent fluence on the sample, a high degree of mechanical stability, and a low background signal from the x-ray microscope. The x-ray scanning microscope PtyNAMi at PETRA III is designed for high-spatial-resolution 3D imaging with high sensitivity. The design concept is presented with a special focus on real-time metrology of the sample position during tomographic scanning microscopy.

KW - Interferometry

KW - Nanopositioning

KW - Ptychography

KW - X-ray scanning microscopy

U2 - 10.1117/12.2273710

DO - 10.1117/12.2273710

M3 - Paper in conference proceeding

AN - SCOPUS:85034226731

VL - 10389

BT - X-Ray Nanoimaging

A2 - Somogyi, Andrea

A2 - Lai, Barry

PB - SPIE

Y2 - 7 August 2017 through 8 August 2017

ER -

Schroer CG, Seyrich M, Kahnt M, Botta S, Döhrmann R, Falkenberg G et al. PtyNAMi: Ptychographic nano-analytical microscope at PETRA III - Interferometrically tracking positions for 3D x-ray scanning microscopy using a ball-lens retroreflector. In Somogyi A, Lai B, editors, X-Ray Nanoimaging: Instruments and Methods III. Vol. 10389. SPIE. 2017. 103890E https://doi.org/10.1117/12.2273710

PtyNAMi: Ptychographic nano-analytical microscope at PETRA III - Interferometrically tracking positions for 3D x-ray scanning microscopy using a ball-lens retroreflector

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