Real-time studies of the atomic layer deposition of metal oxides using Ambient pressure x-ray photoelectron spectroscopy

Joachim Schnadt; Ashley Head; Shilpi Chaudhary; Sofie Yngman; Niclas Johansson; Olesia Snezhkova; Jan Knudsen; Jesper N Andersen; Hendrik Bluhm; Anders Mikkelsen; Rainer Timm

Real-time studies of the atomic layer deposition of metal oxides using Ambient pressure x-ray photoelectron spectroscopy

Joachim Schnadt, Ashley Head, Shilpi Chaudhary, Sofie Yngman, Niclas Johansson, Olesia Snezhkova, Jan Knudsen, Jesper N Andersen, Hendrik Bluhm, Anders Mikkelsen, Rainer Timm

Synchrotron Radiation Research

Research output: Contribution to conference › Abstract › peer-review

Original language	English
Publication status	Published - 2014
Event	APS March Meeting, 2014 - Denver, Coloardo, United States Duration: 2014 Mar 3 → 2014 Mar 7

Conference

Conference	APS March Meeting, 2014
Country/Territory	United States
City	Denver, Coloardo
Period	2014/03/03 → 2014/03/07

Subject classification (UKÄ)

Atom and Molecular Physics and Optics

Cite this

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title = "Real-time studies of the atomic layer deposition of metal oxides using Ambient pressure x-ray photoelectron spectroscopy",

author = "Joachim Schnadt and Ashley Head and Shilpi Chaudhary and Sofie Yngman and Niclas Johansson and Olesia Snezhkova and Jan Knudsen and Andersen, {Jesper N} and Hendrik Bluhm and Anders Mikkelsen and Rainer Timm",

year = "2014",

language = "English",

note = "APS March Meeting, 2014 ; Conference date: 03-03-2014 Through 07-03-2014",

}

TY - CONF

T1 - Real-time studies of the atomic layer deposition of metal oxides using Ambient pressure x-ray photoelectron spectroscopy

AU - Schnadt, Joachim

AU - Head, Ashley

AU - Chaudhary, Shilpi

AU - Yngman, Sofie

AU - Johansson, Niclas

AU - Snezhkova, Olesia

AU - Knudsen, Jan

AU - Andersen, Jesper N

AU - Bluhm, Hendrik

AU - Mikkelsen, Anders

AU - Timm, Rainer

PY - 2014

Y1 - 2014

M3 - Abstract

T2 - APS March Meeting, 2014

Y2 - 3 March 2014 through 7 March 2014

ER -