Reduction of the Schottky barrier height on silicon carbide using Au nano-particles

SK Lee, CM Zetterling, M Ostling, I Åberg, Martin Magnusson, Knut Deppert, Lars-Erik Wernersson, Lars Samuelson, A Litwin

Research output: Contribution to journalArticlepeer-review

76 Citations (SciVal)

Abstract

By the incorporation of size-selected Au nano-particles in Ti Schottky contacts on silicon carbide, we could observe considerably lower the barrier height of the contacts. This result could be obtained for both n- and p-type Schottky contacts using current-voltage and capacitance voltage measurements. For n-type Schottky contacts, we observed reductions of 0.19-0.25 eV on 4H-SiC and 0.15-0.17 eV on 6H-SiC as compared with particle-free Ti Schottky contacts. For p-type SiC, the reduction was a little lower with 0.02-0.05 eV on 4H- and 0.10-0.13 eV on 6H-SiC. The reduction of the Schottky barrier height is explained using a model with enhanced electric field at the interface due to the small size of the circular patch and the large difference of the barrier height between Ti and Au.
Original languageEnglish
Pages (from-to)1433-1440
JournalSolid-State Electronics
Volume46
Issue number9
DOIs
Publication statusPublished - 2002

Subject classification (UKÄ)

  • Condensed Matter Physics
  • Electrical Engineering, Electronic Engineering, Information Engineering

Keywords

  • image force
  • silicon carbide
  • nano-particles
  • Schottky barrier height
  • lowering

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