Resonators with integrated CMOS circuitry for mass sensing applications, fabricated by electron beam lithography

Sara Ghatnekar-Nilsson, E Forsen, G Abadal, J Verd, F Campabadal, F Perez-Murano, J Esteve, N Barniol, A Boisen, Lars Montelius

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36 Citations (SciVal)

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