Self-aligned, gate-last process for vertical InAs nanowire MOSFETs on Si

Martin Berg, Karl-Magnus Persson, Olli-Pekka Kilpi, Johannes Svensson, Erik Lind, Lars-Erik Wernersson

Research output: Chapter in Book/Report/Conference proceedingPaper in conference proceedingpeer-review

248 Downloads (Pure)

Fingerprint

Dive into the research topics of 'Self-aligned, gate-last process for vertical InAs nanowire MOSFETs on Si'. Together they form a unique fingerprint.

Material Science

Engineering