Self-aligned, gate-last process for vertical InAs nanowire MOSFETs on Si

Martin Berg, Karl-Magnus Persson, Olli-Pekka Kilpi, Johannes Svensson, Erik Lind, Lars-Erik Wernersson

Research output: Chapter in Book/Report/Conference proceeding › Paper in conference proceeding › peer-review

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1 Doctoral Thesis (compilation)

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2019
Vertical III-V Nanowire MOSFETs
Kilpi, O.-P., 2019, Department of Electrical and Information Technology, Lund University. 90 p.
Research output: Thesis › Doctoral Thesis (compilation)