Abstract
Self-assembly gold nanostructured membranes are created to mechanically stabilize the catalyst movement during metal assisted chemical etching. This results in an improved vertical control of the etching profile for high aspect ratio silicon microstructures. The new method is a robust and cheap microfabrication for dense micro-patterns on a large area, such as diffraction gratings for hard X-ray phase contrast imaging and metrology.
| Original language | English |
|---|---|
| Pages (from-to) | 16025-16029 |
| Number of pages | 5 |
| Journal | RSC Advances |
| Volume | 6 |
| Issue number | 19 |
| DOIs | |
| Publication status | Published - 2016 |
| Externally published | Yes |
Bibliographical note
Publisher Copyright:© 2016 The Royal Society of Chemistry.
Subject classification (UKÄ)
- Physical Chemistry (including Surface- and Colloid Chemistry)
- Nano-technology
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