Structural and magnetic properties of GaAs thin films with embedded nanoclusters were investigated as a function of the annealing temperature and Mn content. Surprisingly, the presence of two kinds of nanoclusters with different structure was detected in most of the samples independently of the thermal processing or Mn content. This proved that the presence of a given type of clusters cannot be assumed a priori as is reported in many papers. The fraction of Mn atoms in each kind of cluster was estimated from the extended X-ray absorption fine structure analysis. This analysis ruled out the possibility of the existence of nanoclusters containing a hypothetic MnAs cubic compound-only (Ga,Mn)As cubic and hexagonal MnAs clusters were detected. Moreover the bimodal distribution of Mn magnetic moments was found, which scales with the estimated fraction of Mn atoms in the cubic and hexagonal clusters. (C) 2011 Elsevier Inc. All rights reserved.
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