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Structural and optical properties of low-temperature ZnO films grown by atomic layer deposition with diethylzinc and water precursors

Iwona Kowalik, E. Guziewicz, K. Kopalko, S. Yatsunenko, A. Wojcik-Glodowska, M. Godlewski, P. Dluzewski, E. Lusakowska, W. Paszkowicz

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