SU8 cantilevers for sensing applications in liquid and gaseous environments

Maria Tenje, S. Keller, S. Dohn, A. Boisen

Research output: Contribution to conferenceAbstractpeer-review

Original languageEnglish
Publication statusPublished - 2009
Externally publishedYes
Event11th International Scanning Probe Microscopy Conference (ISPM 2009) - Madrid, Spain
Duration: 2009 Jun 172009 Jun 19

Conference

Conference11th International Scanning Probe Microscopy Conference (ISPM 2009)
Country/TerritorySpain
CityMadrid
Period2009/06/172009/06/19

Subject classification (UKÄ)

  • Medical Engineering

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